Microelectromechanical Systems and Related Web Sites

Counter Started 7/9/98: 


The following list of web sites was extracted from the Stroud Reference Database. It is being developed as an aid for MEMS researchers, students and other interested parties. New sites will be added as they are located. Suggested additions are welcomed and can be submitted to mailto:robertstroud@earthlink.net (no attachments, please). While a reasonable effort is made to keep this site list current, some of the addresses my change without the author's knowledge. If you are aware of any changes or outdated addresses, please send a message with the correction to the above e-mail address. Thank you to all who have so far sent in suggestions and corrections. Please also read the disclaimer and copyright at the bottom of this page.

This list is divided into 5 sections. These are

MEMS reference sources

MEMS and related sites

Home Pages of Individuals

This consists of sites belonging to individuals in the MEMS field.

Space and Spacecraft Related Sites

One of my particular application areas of interest.

Other Sites of Interest

Sites of general interest to the MEMS community but not necessarily MEMS specific.


MEMS reference sources

There are several MEMS reference sources available that I recommend, particularly for students new to the technology. These include;

1. "Micromechanics and MEMS; Classic and Seminal Papers to 1990" by William Trimmer, IEEE Order Number PC4390, ISBN 0-7803-1085-3, 1997. Dr. Trimmer's book is a wealth of articles from the early days of MEMS, many of which are difficult to find elsewhere. I highly recommend it for any serious students and professionals in the field. For the student it provides insights into the original research and development. The first, and perhaps most significant article that I recommend for people new to the field is "Microrobots and Micromechanical Systems" by W. Trimmer. It is on page 96 of this text and is an excellent introduction to scaling laws. An understanding of these is fundamental to an understanding of MEMS devices and their value. The body of the article can also be found at


However, this does not include the appendices, which give excellent examples of the scaling laws for different phenomena.

2. A short tutorial on micromachining as well as some interesting articles, Belle Mead Research


3. Analog Devices iMEMS Technology. A brief tutorial on surface micromachining.


4. "SmartMUMPs Design Handbook including MUMPs Introduction and Design Rules (rev. 4)" by David A. Koester, Ramaswamy Mahadevan, Alex Shishkoff and Karen W. Markus, MEMS Technology Applications Center, MCNC.


5. "Introduction to Microengineering" by Danny Bank


6. "A Quick Tutorial, Surface Micromachining"


7. University of Wisconsin short course on MEMS


8. Case Western Reserve University course covering

Part I - MEMS Overview

Part II - Surface Micromachining Technology

Part III - The MUMPS Process and Design


9. MicroElectroMechanical Systems (MEMS) Module by N.C. MacDonald, Cornell University


10. Precision Micromanufacturing Processes Applied to Miniaturization Technology

It is extensive tutorials on micromechanical machining such as micromilling, drilling, diamond machining, laser, etc. by Dr. Craig Friedrich, Mechanical Engineering Department, Michigan Technological University.


11. MEMS Clearinghouse

Tutorial Information about MEMS


12. An Introduction to MEMS, by Elliot Hui



MEMS and Related Sites


DARPA Electronics Technology Office home page that contains information on the vision, priorities and R&D thrusts supported by ETO. It also describes the organization components and personnel, and ETO solicitations.


2. DARPA Microelectromechanical Systems (MEMS)

Summaries of all DARPA MEMS projects, information on the MEMS Principal Investigator meetings, a 1997 market survey, and an overview presentation.


Related DARPA sites:

MicroFluidic Molecular Systems (MicroFlumes) http://web-ext2.darpa.mil/ETO/mFlumes/index.html

MicroOptoElectroMechanical Systems (MOEMS) http://web-ext2.darpa.mil/ETO/MOEMS/index.html

IDA MEMS transition program http://www.ida.org/MEMS/

MEMS Project Summaries http://web-ext2.darpa.mil/ETO/MEMS/Projects/index.html#current

Optical Micro-NETworks http://www.darpa.mil/ETO/OMNET/index.html

3. MESA Research Institute, the Netherlands

MESA is a university of Twente research institute for micro electronics, materials and molecular engineering, and sensors and actuators. MESA stands for Micro Electronics, Materials- and Molecular Engineering, and Sensors and Actuators.

new:    http://home.earthlink.net/~trimmerw/mems/Stroud_Dbase.html


Two MESA sites of particular interest to MEMS researchers are:

Micro Mechanical Devices Group at http://www.el.utwente.nl/tdm/mmd/index.html

Biosensors and Electrochemical Sensors at http://www-bio.el.utwente.nl/research/sensors.htm

Micromechanical Devices Mesa Institute Twente University

The Micro Mechanical Devices group (better known as: "MicMec"), conducted by Prof. M. Elwenspoek, is part of the MESA Research Institute at the University of Twente, The Netherlands. It is one of the leading groups in the world in the field of Micro System Technology (MST) in general and MicroElectroMechanical Systems (MEMS) in particular.


4. ECAD Laboratory for Applied Microsystems, Cardiff University of Wales

The Laboratory for Applied Microsystems, ECAD, is an interdisciplinary research activity on fundamental and applied aspects of microengineering and microsystem technology with a strong bioscience orientation (BioMEMS). Other research themes are orientated towards biomedical and space applications.


5. MSTNET: Electronic mailer for European Microengineering and Microsystems Technology

MSTNET is a global electronic mailer for the industrial and academic community involved in Microsystems Technology. This is provided by the Laboratory for Applied Microsystems at the University of Cardiff, UK. MSTNET is an electronic-mailing distribution list covering the area of Microsystems Technology. It acts as a self-contributing bulletin board for the exchange of information, e.g. available technologies, expertise, processing opportunities, collaboration requirements, employment vacancies, as well as a route for the rapid acquisition of technical help on problems and the procurement of materials/equipment etc.


6. Europractice Basic Services

EUROPRACTICE is an EC initiative which aims to stimulate the wider exploitation of state-of-the-art microelectronics technologies by European industry. The ultimate goal of EUROPRACTICE is to enhance European industrial competitiveness in the global market-place.


7. European Microsystems Technology On-line

EUROPRACTICE is an EC initiative which aims to stimulate the wider exploitation of state-of-the-art microelectronics technologies by European industry. The ultimate goal of EUROPRACTICE is to enhance European industrial competitiveness in the global market-place. There are several sites for Europractice.


The Competence Centres (CCs) provide application support and design skills organised around products and applications knowledge rather than specific technologies. Each Centre is a fabless design house, choosing the most appropriate technologies for their tasks. They have design skills in the relevant technologies or make use of other design capabilities.

Manufacturing Clusters (MCs) are set up to provide access to microsystems technologies for prototyping and small volume production in a cheap and flexible manner. The varied facilities, skills and technologies available among the members of a Cluster will be offered in a combined manner to present customers with a global solution to their problem.



MST/MEMS related web sites on the MST homepage

This site also includes mstonline which is an information service for the MST community. It provides regularly up to date information on technology, applications, markets, news and events with specific emphasis on Germany but covers all MST related regions worldwide.


EMSTO, the European information clearinghouse on microsystems technology.



A chronological list of conferences, workshops, courses, etc. of MST events world wide.


8. MST International

This site contains links to the following:

News and Announcements, News for the Community, MST Newsletter and Events

MST Country Reports / European Initiatives , Information on MST/MEMS in various countries

MST NET, Electronic Mailer for Microengineering & Microsystems Technology

MST Yellow Pages / NEXUS Members, directory of products, services, organizations and personnel

MST related Web-Sites, Worldwide WWW servers related to MST/MEMS



MST related Web-Sites

Search their worldwide WWW servers related to MST/MEMS


9. Institute of Microtechnology, Bucharest, Romania

National Institute of Research-Development for Microtechnology

Objectives: multidisciplinary research in microsystems, technological development (microtechnologies), industrial services in microelectronics


10. Romanian Microsystems Technology On-line

The Romanian Information Clearinghouse on Microsystem Technology provided by Institute of Microtechnology (Bucharest, Romania) on behalf of NEXUSPAN (PAN-EUROPEAN Network in Multifunctional Microsystems). ROMSTO is an extension of EMSTO (European Microsystem Technology On-line)


11. MEMStek Products LLC

This company is now out of business.


12. Silicon Microoptics in Delft

Delft University of Technology


Optics, MEMS and related links provided by the Delft University of Technology


13. Sandia National Laboratories, Intelligent Micromachine Initiative

Sandia National Laboratories is a recognized leader in this emerging field. Sandia has developed unique technologies which enable the realization of complex mechanical systems on a chip, and the integration of these mechanical systems with on-chip control and communication electronics. Tutorial available.


Sandia National Laboratories Intelligent Micro Machine Initiative


SAMPLES (Sandia Agile MEMS Prototyping, Layout Tools, Education, and Services) Program

Sandia's fabrication technologies available to everyone.


14. Belle Mead Research

Home page of Belle Mead Research which is a company that specializes in providing cost effective solutions to companies in micromechanics. There is a short tutorial on micromachining as well as some interesting articles.


The Belle Mead site also has pointers to the home pages of several patent offices and Intellectual Property Organizations can be found at


Links on this page include;

USA patent office - English ; http://www.uspto.gov/

Complete Search of US patents at IBM; http://patent.womplex.ibm.com/

Australian patent office - English ; http://www.aipo.gov.au/

Austrian patent office -German ; error

Brazilian patent office - Portuguese; error

Canadian patent office - English / French; error

Finish patent office - English / Finish / Swedish; http://www.prh.fi/engl.html

European patent office - English; http://www.european-patent-office.org/index.htm

Hong Kong patent office - Chinese / English; http://www.houston.com.hk:80/hkgipd/

Japanese patent office - English / Japanese; error

New Zealand patent office - English;

Spanish patent office - Spanish ; file not found

Swedish patent office - English / Swedish; http://www.prv.se/prveng/front.htm

United Kingdom patent office - English; not found

World Intellectual Property Organization - English; not found

Other Intellectual Property Offices


Australia http://www.aipo.gov.au/

Austria (German) http://www.ping.at/patent/index.htm

Belgium http://www.european-patent-office.org/patlib/country/belgium/

Brazil http://www.bdt.org.br/bdt/inpi/english

Canada http://xinfo.ic.gc.ca/CIPO/

China, People's Republic of http://www.cpo.cn.net/english.htm

Croatia http://www.cpo.cn.net/english.htm

Denmark http://www.dkpto.dk/index1e.htm

European Patent Office http://www.european-patent-office.org/

Trilateral Offices' (EPO, JPO, USPTO) Trilateral Statistics Report, 1995 Edition, (2Jan97)

Finland http://www.prh.fi/engl.html

France (French) http://www.evariste.anvar.fr/inpi/

Germany (German) http://www.deutsches-Patentamt.de/

Greece error

Hong Kong http://www.houston.com.hk:80/hkgipd/

Hungary http://www.hpo.hu/

Note: The Hungarian site wants to set a lot of cookies

Italy http://www.european-patent-office.org/it/homepage/homepage.htm

Japan http://www.jpo-miti.go.jp/

Comparative Study of Examination Practices by the Trilateral Offices in the Field of Biotechnology (13Nov97) http://www.jpo-miti.go.jp/siryoe/contents.htm

Korea not found

Lithuania http://vytautas.is.lt/vpb/engl/

Luxembourg error

Malaysia http://kpdnhq.gov.my/ip/

Monaco (French?) http://www.european-patent-office.org/patlib/country/monaco/

New Zealand

Peru (Spanish) http://www.indecopi.gob.pe/

Poland http://www.ibspan.waw.pl/

Portugal (Portuguese) http://www.inpi.pt/

Romania http://www.osim.ro/eng/welcome.htm

Slovenia not found


Sweden http://www.prv.se/prveng/front.htm


United Kingdom http://www.patent.gov.uk/

United States Patent Office http://www.uspto.gov/

Office of Technology Licensing, U.C. Berkeley http://socrates.berkeley.edu/~otl/

World Intellectual Property Organization (WIPO) http://www.wipo.org/

WIPO Arbitration Center http://www.wipo.org/eng/general/arbit.htm

WIPO Diplomatic Conference on Certain Copyright and Neighboring Rights Questions


Transcript - 11/12/96 Briefing and Request for Comments on the Chairman's Texts of Three Agreements for the Diplomatic Conference http://www.uspto.gov/web/offices/dcom/olia/diplconf/briefing.pdf

in Adobe PDF Format


WIPO Documents Available from PTO http://www.uspto.gov/web/offices/pac/dapps/pct/

15. University of Wisconsin MEMS

Describes research, products and partners. Course available. Information about pressure sensors, gears, resonant transducers, deep X-ray lithography and precision engineering.


Search all UW-MEMS pages


Other MEMS links




Other MEMS links


Photograph Archive


Short course on MEMS


16. Micro Systems at the Forschungszentrum Karlsruhe

The Karlsruhe Research Center (formerly Karlsruhe Nuclear Research Center, KfK) is one of the largest non-commercial science and engineering research institutions in Germany. It works on research and development problems of public interest, exclusively for peaceful purposes, in the fields of technology and the environment. Its "Research for Environmentally Sustainable High Technologies" program is concentrated on these four main areas: environment, energy, microsystems engineering, and fundamental research.


Microsystems Technology Program (PMT)


17. MEMS Clearinghouse, University of Southern California, Information Sciences Institute

The MEMS Clearinghouse was established to be a repository of information about MicroElectroMechanical Systems (MEMS) and to foster communication and the sharing of data within the MEMS community.


Links to other MEMS web sites


MEMS Fabrication Center Information Template

Applied Microengineering Ltd (AML)

The information in this section was obtained as a response to a questionnaire on the MEMS Discussion group. It provides a compendium of micro-mechanical processing capabilities across various organizations. Its purpose to provide a starting point for places to look for more information by people interested in the area. Inclusion in this compendium should not be construed as a commitment on the part of any organization or institution to provide processing or other services.


The Micro Mechanical Processing Center of USC/Information Sciences Institute

Is a prototyping service for standard cell and full-custom VLSI circuit development. MOS Implementation Service (MOSIS) is in the process of expanding their service to include MEMS devices.


MEMS Search


MEMS discussion group


MEMS Newsletter


MEMS Clearinghouse Yellow Pages Organizations

This section contains links to all organizations in the Yellow Pages of the MEMS Clearinghouse. It includes links to our Yellow Page when it exists, and otherwise links directly to the organization's Web page. Organizations listed include MEMS-related companies, universities, research centers, etc.


18. Sensors, Microstructures, and Actuators Working Group (SMAWG)

SMAWG is an independent professional organization welcoming participants from academia, industry, and government. Our objective is to create a forum for discussion of MEMS and related technology, and to benefit from the collaborations which will inevitably result. The SMAWG format is loosely modeled on the successful Bay Area MEMS Journal Club in Northern California. The motivation behind that format is to foster interactive discussion sessions rather than a formal seminar series.


19. Bay Area MEMS Journal Club

The San Francisco Bay Area MEMS Journal Club is an informal forum for professionals with an interest in the MEMS field. Meetings are held in the evening on the first Wednesday of each month and typically follow an open-discussion format in which group participation is encouraged. Topics span from fabrication technologies to applications of MEMS.


20. MEMS Technology Applications Center, MCNC

MCNC offers development, prototyping, and manufacturing of MEMS devices and systems based on surface, bulk, and/or LIGA micromachining. The Multi-User MEMS Processes, or MUMPs, is a DARPA-supported program that provides the domestic industrial, academic, and government communities with cost effective surface micromachining processing for prototyping and proof-of-concept fabrication. MUMPs is designed to be flexible, easy to use, and most importantly, cost effective. Course available.


MCNC also provides information on many MEMS organizations in their TechNet section at


The Consolidated Micromechanical Element Library, CaMEL. consists of two independent parts; the nonparameterized cell database and the parameterized microelectromechanical element library, PME. The aim is to provide MEMS cell libraries that are not only useful for novice MEMS designers, but to experienced ones as well. Both libraries are intended to assist the user in the design and layout of MEMS devices by providing an initial layout for components of a MEMS system. It is assumed that the user will modify these elements and customize them as desired and assemble designs using a suitable mask layout editor (the layout editor must support non-rectangular geometries).


21. HI-MEMS Alliance, MEMS Technology Applications Center

The HI-MEMS Alliance, led by MCNC, is a partnership among commercial manufacturers, universities, two federal laboratories, and a non-profit high-technology center established to provide customers with access to LIGA for the fabrication of precision micro-components.


22. Micromachining, CMC and Can-MEMS

Canadian Microelectronics Corporation (CMC) is a not-for-profit organization established in 1984 to provide industrial microelectronic technologies to Canadian universities, both to facilitate world-class research and to ensure a strong source of well-trained graduates. CMC is supported by contributions of technology, services and cash from industry and by matching funding from the federal Natural Sciences and Engineering Research Council. CMC's membership now includes 35 universities and 20 industrial organizations, each selecting a member representative who acts as the main liaison with CMC.


Index of /Fabrication/Micromachining/


23. Louisiana Tech University, Institute for Micromachining

A resource for the development of microfabrication and microassembly processes for industrial, medical and consumer products.


24. Case Western Reserve University MEMS Resource home page

The Microelectromechanical Systems (MEMS) Resource at Case Western Reserve University (CWRU) provides an interdisciplinary environment for graduate education through state-of-the-art research in micromachining, microsensors, microactuators, and microsystems.


There is also a short course covering

Part I - MEMS Overview

Part II - Surface Micromachining Technology

Part III - The MUMPS Process and Design


25. Ohio MEMSNet

A consortium of Ohio universities and the Cleveland Clinic Foundation, in conjunction with the CAMP, the Edision BioTechnology Center, Ohio's two major Federal laboratories, and a number of Ohio industries, have established the Ohio MEMSNet, a state-wide fabrication, design, and testing infrastructure capability for the emerging field of microelectromechanical systems (MEMS).


26. MIT Microsystems Technology Laboratories

The MIT Microsystems Technology Laboratories (MTL) is a collection of people and facilities bound together by a shared mission emphasizing education, research, and service in microsystems technology.


MIT Microsystems Technology Laboratories, MEMS Program



There are several groups at MIT working on MEMS devices, modeling, and applications.


The Semiconductor Subway

The Semiconductor Subway provides links to all manner of semiconductor and microsystems related information, including fabrication facilities, research activities, standards work, etc. It has a clickable map to connect to other sources of information


MIT Center of Excellence in Microsystem Technologies

The goal of this SRC Center of Excellence (COE) is to develop key technologies for the fabrication of VLSI circuits and VLSI-compatible monolithic microsystems. The areas of research in this COE were chosen with the Semiconductor Research Corporation (SRC) 2001 goals in mind. These areas address a large volume of markets such as personal communication and computing, and automotive electronics. You can browse the four research areas listed below to find out about the related projects.

1.Microelectromechanical Technology

2.Low Power RF Communication Technology

3.Silicon Microphotonics Technology

4.Digital Circuit Technology.


Distributed Information Systems for MEMS, ISAT Study, 1995, Final Report


27. Distributed Microsystems Research Group

UCLA Electrical Engineering Department

The Distributed Microsystems Research (DMSR) Group is comprised of several ARPA-funded programs, which together are involved in research and development of the design tools, algorithms, architectures, and CMOS integration techniques needed to enable next-generation systems for distributed communications, networking, monitoring, and high-speed signal processing.


Micro-Manufacturing Laboratory!

The WWW Home Page for Professor C.J. Kim's Micro-Manufacturing Laboratory at UCLA


28. Selected MEMS-related Web Sites for EE 234/434

The purpose of this web page is to offer easy access to some of the excellent web sites devoted to MEMS and MEMS-related

material. The intention is to provide a comprehensive overview of general micromechanical design and fabrication. There are links to:

a) Fabrication: Various universities and companies involved with the fabrication of MEMS devices.

b) Research/Development/Education. These sites cover the continuously expanding realm of MEMS. They reveal some cutting edge R & D, and also include links to sites with an educational purpose.

c) Poly-Silicon mechanical properties, a bibliography of papers covering measurements of important mechanical properties of poly-Silicon.


29. Carnegie Mellon Microelectromechanical Systems Laboratory

The Microelectromechanical Systems (MEMS) Laboratory is associated jointly with the Department of Electrical and Computer Engineering and the Robotics Institute (part of the School of Computer Science) at Carnegie Mellon University. In the MEMS Lab, we are developing miniature sensor and actuator systems made using batch-fabrication processes, especially integrated-circuit fabrication processes. Research in this area is motivated by the potential to produce high performance, low-cost, miniature sensors and actuators. Smart sensors are made by combining microstructures and circuits on a single silicon chip. Specific research areas of interest include nanometer-scale data storage, microsensors and microactuators, MEMS design tools, micromechanical component modeling, embedded microinstruments, and microrobotics.


The Microelectromechanical Systems (MEMS) Laboratory is associated jointly with the Department of Electrical and Computer Engineering (ECE), the Robotics Institute (part of the School of Computer Science), and the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University.


30. Alberta Microelectronics Centre

The Alberta Microelectronic Centre (AMC) is an Alberta technology corporation, with a mission to develop the best commercially relevant microelectronic technologies for its customers' products and services.


The Materials and Devices Laboratory of AMC develops and manufactures miniaturized devices using semi-conductor fabrication techniques, often referred to as micromachining technologies. AMC fabricates a range of products that are used in the telecommunications and biotechnology sectors, and is known as one of North America's foremost micromachining companies.


31. Berkeley Sensors and Actuators Center

Berkeley Sensor & Actuator Center (BSAC) is a NSF/Industry/University cooperative research center funded by the National Science Foundation and a consortium of corporations and government agencies. Since its foundation in 1986, BSAC has been devoted to research on sensors and miniature moving mechanical elements or MEMS (MicroElectro Mechanical Systems) that take advantage of the remarkable progress made in integrated-circuit technology. BSAC researchers fabricate most of their devices in the UC Berkeley Microfabrication Laboratory. The laboratory is located on the 4th floor of Cory Hall which is home to the Electrical Engineering department of the University of California at Berkeley.


Microphotonics Group

Microphotonic systems using silicon surface micromachining


Mechanical Properties of Polycrystalline Silicon Bibliography

This is a collection of text files listing papers which report mechanical properties of polycrystalline silicon.


32. EG&G IC Sensors

Based in Milpitas, California, EG&G uses state-of-the-art silicon micromachining technology to manufacture components for physical measurement and control. EG&G IC Sensors' product line includes pressure sensors, accelerometers, valves, and custom silicon microstructures. The firm's major markets are industrial, automotive, and medical applications, along with consumer electronics and aerospace.


EG&G Optoelectronics Group

EG&G Optoelectronics business segment consists of eight autonomous divisions including: EG&G Amorphous Silicon, EG&G Canada Ltd., EG&G Electro-Optics, EG&G Heimann Optoelectronics, EG&G IC Sensors, EG&G Judson, EG&G Reticon and EG&G Vactec.


33. Jet Propulsion Laboratory, California Institute of Technology

Center for Space Microelectronics Technology and Robotics and Mars Exploration Technology home page






The JPL Microdevices Laboratory (MDL)

MDL at NASA's Jet Propulsion Laboratory (JPL) is a facility dedicated to create, develop, integrate and deliver critical microdevice technologies and products enabling NASA and DoD space missions and enhancing U.S. competitiveness worldwide. MDL is a primary research and technology development facility in the Center for Space Microelectronics Technology (CSMT) at JPL and is operated by the Microdevice Section (346). MDL provides end-to-end device development capabilities and a staff with expertise in technologies over a wide variety of fields. Devices based on silicon, III-V compound semiconductors, and superconductors can be fabricated with nanometer-size features and fully. MDL enables the development of a multitude of microdevices such as infrared detectors, millimeter and submillimeter wave sensors, UV and x-ray CCDs, photonic devices, micromagnetic devices, accelerometers, seismometers, meteorological sensors. chemical sensors, gyroscopes and electronic neural networks. Prototyping of devices from concept to prototype in less than 2 years has been demonstrated.


34. Applied Microengineering Ltd. Home Page

AML is an Independent, Industrial Commercial organization, dedicated to Microengineering. Microengineering, sometimes referred to as Micromachining, Microsystems (MST), MicroElectroMechanical Systems (MEMS) is defined by AML as a technology using Silicon wafers, as the unit of production and base material, processed by a variety of microelectronic (and other) wafer, batch, techniques to produce identical millimeter sized devices with micron sized features, accurately and at low cost. AML's mission is to help Industry exploit Microengineering. This is achieved via the design, development, productionisation and manufacture of microengineered products (currently mainly sensors) on behalf of industry.


Applied Microengineering Ltd. News Letter


35. Professor Y. C. Lee's Research Group

Electronic Packaging Research at the University of Colorado, Boulder

Includes research in MEMS, microelectronics, optoelectronics, millimeter waves.


Microelectromechanical Systems, University of Colorado, Boulder, CO


36. Fujita Laboratory

Institute of Industrial Science, The University of Tokyo,


E. H. Yang's Home Page

Contains descriptions of his work in MEMS as well as links to other Fujita and university MEMS pages. It also contains e-mail addresses and links to members of the Fujita research team.


37. Advanced Technology Program at NIST

The ATP's mission is to stimulate U.S. economic growth by developing high risk and enabling technologies through industry-driven cost-shared partnerships. ATP is currently organizing a focused program on MEMS that could be funded on the order of $130M over 4 years.


The MicroElectroMechanical Systems (MEMS) Project is within the IC Technology Group of The

Semiconductor Electronics Division at The National Institute of Standards and Technology (NIST). We

focus on integrated MEMS that are compatible with commercial CMOS technology.

MicroElectroMechanical Systems (MEMS) IC Technology Group at NIST


The MicroElectroMechanical Systems (MEMS) Project is within the IC Technology Group of The Semiconductor Electronics Division at The National Institute of Standards and Technology (NIST). They focus on integrated MEMS that are compatible with commercial CMOS technology.


Research Opportunities at NIST


Materials Science at NIST


IC Technology Group

The IC Technology Group conducts a broad range of both experimental and theoretical research related to test-structure-based measurement methods for evaluating processing tool performance, improving device reliability, and characterizing and controlling manufacturing processes needed by the semiconductor industry. The MEMS work objectives are to provide domestic industry with MEMS-based test structures and standardized test methods for characterizing the thermo-electro-mechanical properties of thin films used in MEMS and IC technologies and work with IC foundries to develop infrastructure for improved accessibility of MEMS manufacturing. Research and develop novel metrology applications of MEMS technology.


38. Institut für Mikro- und Informationstechnik home page (In German and English)

This institute is part of the University of Stuttgart and consists of 4 departments. These are micromachining, sensors, microfluidics, and information technology.


39. EMSTO, the European Information Clearinghouse on Microsystem Technology provided by VDI/VDE IT (Teltow, D) together with LAAS-CNRS (Toulouse, F) and ECAD (Cardiff, UK) and MSTB (Swansea, UK) on behalf of NEXUS (Network of Excellence in Multifunctional Microsystems). NEXUS is a network of excellence funded by the European Commission to promote research, development, production and application of microsystems throughout Europe, thus preparing European industries for the world market in this strategic field. This objective is pursued both by providing strategic orientation to the European microsystems community and by stimulating the exchange of information within that community. Presently, Nexus comprises 203 organization in 17 West European countries, both in industries and R&D. In addition, the supplementary networks NEXUSEAST and NEXUSPAN include 50 organizations from 14 Central/East European countries. In the following you will find a description of the structure of NEXUS, and an overview of the specific activities of the network. In particular, opportunities for organizations in Eastern Europe to participate in and to contribute to the activities of NEXUS are discussed.


40. Microengineering Common Interest Group (MCIG).

The MCIG encourages the development and use of microengineering technology and techniques across the widest possible spectrum of UK applications. The specific objective of the Group is to provide a forum for the dissemination of information about, and the discussion of, all aspects of microengineering. This forum includes end users, manufacturers, researchers and providers of prototype facilities. The MCIG aims to co-operate with other appropriate groups and organizations that have the potential to have an impact on the development of microengineering in the UK.


Institution of Electrical Engineers

IEE Professional Group S11: Microengineering


41. The Micromachine Center's home page, Tokyo, Japan

Includes an online quarterly magazine and pages on;

Establishment and Dissemination of Micromachine Technology

Investigation and Research

Collecting and Providing Information

Exchange and Cooperation in Japan and Abroad


Promotional Activities


42. Microfabrication and MEMS Laboratory at Northeastern University

The Microfabrication Laboratory (MFL) was officially established in November of 1995. The laboratory conducts research in two primary areas; MicroElectroMechanical Systems (MEMS) and Transferred Film Technology (TFT). In MEMS, the laboratory's areas of expertise include bulk micromachining, with an emphasis on anisotropic etching and alloy bonding, and nickel plated surface micromachining. In TFT, the laboratory is investigating three dimensional circuits including a CMOS image array and a 64 bit RISC microprocessor.


43. DIMES, the Delft Institute of MicroElectronics and Submicron Technology, the Netherlands

Home page of the Delft Institute of MicroElectronics and Submicron Technology. DIMES is the Dutch national center for research and education on silicon-based micro-electronics. DIMES is related to the faculties of Information Technology and Systems and Applied Sciences at Delft University of Technology, The Netherlands. Currently it has a staff of over 280 people.


See also


44. Boston Area MEMS Seminar (BAMS) Series

The Boston Area MEMS Seminar (BAMS) is held approximately monthly, usually at MIT, to promote MEMS information exchange within the Boston Area. BAMS is co-sponsored by MIT, Analog Devices, and The Foxboro Company




Shear Stress Sensors/Imagers


Caltech Engineering Design Research Laboratory , Structured Design Methods for MEMS

In the past, the design of Micro-Electrical-Mechanical-Systems has been almost entirely trial and error, although MEMS structures have been fabricated for many years. Because of the complex relationship between mask shape and processed MEMS shape, several design and fabrication iterations are often required to refine a preliminary mask-layout. Designers with extensive MEMS fabrication experience can reduce the number of mask design iterations because they possess a detailed intuitive model of the etching process. However, a major goal of this work is to develop automated tools which can both reduce the number of iterations that are necessary for experienced designers, and allow designers who are not specialists in the art of MEMS fabrication to develop reasonably sophisticated designs with a small number of iterations. Furthermore, such automated tools will ultimately result in designs that are more robust with respect to process variations, and are thus most suited to large scale and low cost manufacturing.


Pinelab at Caltech

Researchers are interested in learning, memory, and synaptic plasticity in living neural systems, either in dissociated cell cultures, organotypic cultures (e.g., hippocampal slices), or living animals. Professor Pine and his collaborators have developed a number of new technologies for studying neural systems. Examples include an x-ray microscope for living cells, multi-electrode cell culture chambers, fiber-optic photodiode arrays and high-speed CCD cameras for imaging of neural activity, and silicon probes for long-term interfacing of neural tissue with external electronics.


Roukes Group at Caltech

Explorations with Three-Dimensional Nanostructures in Physics, Engineering and Biology


46. Analog Devices iMEMS Technology

ADI has been a pioneer in integrated surface micromachining along with the University of California, Berkeley. IMEMS is the brainchild of Dr. Richie Payne at ADI and Professor Roger T. Howe, co-director of the Berkeley Sensor & Actuator Center. This site describes surface micromachining technology and how iMEMS is a natural evolution from it


Brief tutorial on surface micromachining.


47. Simon Fraser University

The Institute for Micromachine and Microfabrication Research (IMMR) at Simon Fraser University was established in 1993 to enhance micromachining research and development and to encourage the application of research results in the design and fabrication of miniature sensors and actuators


48. CSEM's mission is to generate new high-tech business, based on leading-edge know-how and expertise in microelectronics, microtechnologies, related systems and materials. As an interface between both in-house and external research and the industrial world, CSEM contributes to the realization of novel products. Relying on its own enabling technologies, CSEM will undertake the development of custom products right through to the manufacturing phase, as well as the procurement of special products in industrial quantities. CSEM is a private company of public utility, the shares in which are held by leading Swiss enterprises. Advanced research programs and capital equipment are partly supported by the Swiss federal government. Beside Switzerland, CSEM is internationally active in a dozen European countries, as well as overseas. Particular CSEM pages including microsystems, sensors and actuators can be accessed at the site given.


49. The Microsystems Institute

The Institute of Microsystems is a multidisciplinary research institute working in the fields of design, simulation, fabrication, integration and application of very small dimension technical systems. Principle fields of research at the institute include:

New effects and concepts for sensor / actuator devices and interface electronics

Conceptual design of the corresponding systems

Simulation of devices and complete systems

Integration technologies

Basic development of new microsystem products

Evaluation phases of development cycles


Other dmtwww pages of interest are:

MEMS WWW sites, http://dmtwww.epfl.ch/ims/www.html

Microsystems Integration Group, http://dmtwww.epfl.ch/ims/micsys/index.html

Microsystems Design Group, http://dmtwww.epfl.ch/ims/sysmic/

DMT Microtechnique http://dmtwww.epfl.ch/index.eng.html

Microsystems Integration Group http://dmtwww.epfl.ch/imt/micsys/

50. Fraunhofer-Institut für Siliziumtechnologie (ISIT)

ISIT works on design, development and production of microelectronic components as well as on microsensors, microactuators and other parts for microsystems technology. All components of this kind can be delivered either being prototypes or customer specific series. With its service offers ISIT as a contract research institute applies to technology-oriented enterprises.


51. Standard Microsystems Corporation's (SMSC)

Specialty Semiconductor Foundry

Standard Microsystems Corporation (SMSC) has been producing semiconductor products since it was founded in 1971. Since then SMSC has created many of the processes used throughout the semiconductor industry. These P-well and N-well processes have been used over the years to produce millions of LSI (large scale integration) products. The 2 and 3 micron fab has produced devices such as floppy disk controllers, CRT controllers, and communication products.


52. TIMA-CMP Laboratory

The TIMA-CMP Laboratory, located in Grenoble, France, conducts research in microelectronics (TIMA) and provides a multi-project wafer production service (CMP). MEMS devices can be fabricated through CMOS-compatible front-side bulk micromachining based on AMS. Optical Elements (DOE) from CSEM are available too. In 1998 CMP introduced the multi-user MEMS Process from MCNC MEMS Technology Applications Center. Engineering kits for MEMS designs have been developed for CADENCE and MENTOR GRAPHICS.




53. Xerox Palo Alto Research Center

MEMS / Smart Matter Research at PARC

PARC's research strategy is to move MEMS beyond its micro-scale origins (where MEMS means micro-Electro-Mechanical-Systems), to create a new field that we call Systemic MEMS, which includes uEMS (micro-scale), mEMS (meso-scale), and MEMS (Macro-scale).


54. Fraunhofer-Institute for Solid State Technology

The Fraunhofer Institute for Solid State Technology IFT is divided into three scientific sections:

The Technology for Microelectronic Systems section addresses issues relating to technologically oriented research and development for integrated circuits on silicon basis. An essential feature is the introduction of a 1,0 µm CMOS process sequence providing local small and medium-sized companies with application-specific small batches. Further activities are in research fields such as single process development, multilayer metallization systems, mask fabrication and equipment evaluation. The second section, Microsystem Technology, pursues objectives in the development of sensor and actuator elements as discrete elements or in combination with further devices to form systems. A broad basis of know-how is available for development in cooperation with industry in microtechnologies, packaging and assembly techniques, thin and thick film technology, microsensors and actuators, microoptics, integrated microanalysis systems (IMAS) signal processing using neuronal networks, and application specific integrated systems (ASIS). The Institute section, System Technology / Telecommunications,


55. Institute of Mechanics, ETH Zürich

WWW server of the Institute of Mechanics. The German name is Institut für Mechanik (IfM). This page deals with micro- and nanomechanics.


56. NASA Space

Instrument and Sensing Technology

Micro-Instrument Technology

On this page:

Micro-Instrument Program Goals and Objectives

Micro-Instrument Technology Program Activity Descriptions

Additional Information


57. Sensorless Manipulation With Micro Actuator Arrays at Cornell University

They investigate manipulation tasks with arrays of microelectromechanical structures (MEMS). They have developed a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe efficient algorithms for their evaluation. Joint work with Bruce Donald, Robert Mihailovich, and Noel MacDonald. They investigate manipulation tasks with arrays of microelectromechanical structures (MEMS). They have developed a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and described efficient algorithms for their evaluation.


Cornell Nanofabrication Facility (CNF)

Formerly the National Nanofabrication Facility (NNF), CNF has served the US research community for more than 15 years by providing nanofabrication services to over 600 research projects on the Cornell University campus. Subjects for research are as diverse as Astronomy and Plant Pathology, and projects delve into the emerging fields of Integrated Optics and Microelectromechanical Structures (MEMS) as well as the more conventional Microelectronics, Physics and Materials Research. The CNF is also one of five members of the National Nanofabrication Users Network.


Recently, graduate student Jim Jennings, research associate Daniela Rus, graduate student Russell Brown, Professor Bruce Donald, and lab alumnus Jonathan Rees (now at MIT), developed a team of autonomous mobile robots that can perform sophisticated distributed manipulation tasks (such as moving furniture). The robots run robust SPMD protocols that are completely asynchronous and require no communication. Grad student Karl B?hringer, Professor Bruce Donald, and EE Professor Noel MacDonald, are building a massively parallel array of microactuators in the Cornell National Nanofabrication Laboratory. The array is a SCREAM chip containing over 11,000 actuators in 1 square centemeter, and can orient small parts without sensory feedback. Our microfabricated actuator arrays could be used to construct programmable parts-feeders (at any scale), or to build self-propelled IC's (walking VLSI chips.)


MicroElectroMechanical Systems (MEMS) Module


58. Tanner EDA

Tanner Research, Inc. develops and markets electronic design automation (EDA) software to meet the complex design needs of integrated circuits (ICs), multi-chip modules (MCMs) and microelectromechanical systems (MEMS). Founded in 1988, Tanner Research is a privately held corporation located in Pasadena, California. For fabrication requirements, Tanner Tools provide standard formatted GDSII and CIF file outputs. For prototype design and low cost, low volume production requirements, the tools directly support wafer sharing services provided by MOSIS and Orbit Semiconductor for IC fabrication, MIDAS for MCM fabrication, and the MCNC MUMPS MCNC MUMPS service for MEMS fabrication. The software is available for PC, Macintosh and UNIX platforms.


59. Electronic Visions Co.

Electronic Visions was the first company to offer equipment that could fulfill the production requirements for the microelectromechanical systems (MEMS) and micromachining industry. The technique of process separation, designed by Electronic Visions, provides an efficient and low ownership cost production system for the MEMS market. This technique has been established as the industry standard. In 1994 Electronic Visions installed the very first Silicon on Insulator (SOI) high-volume production bonder.


60. MicroSensors, Inc.

MicroSensors, Inc. is focused on designing, developing and producing micromachined sensors and sensor readout circuits for MEMS applications. Founded in 1997 as a wholly-owned subsidiary of Irvine Sensors Corporation, MicroSensors, Inc. is responsible for the Silicon MicroRing GyroTM for motion sensing and inertial navigation and the Universal Capacitive ReadoutTM ASIC for interfacing and controlling a variety of MEMS devices. The company also provides design services for MEMS devices, mixed-signal and analog circuits, precision readout interfaces, and low power, low noise, and neural integrated circuits.


61. Surface Technology Systems

Surface Technology Systems (STS) is a manufacturer of plasma systems for thin film processing in both R&D and production environments. STS offers a wide product range covering ICP, ECR, RIE, Plasma CVD and sputtering technologies. STS's Advanced Silicon etch (ASEª) for the fabrication of Micro-Electro-Mechanical Systems (MEMS) provides the significant improvements in etch anisotropy long awaited by the MEMS community. Using this technique, it is finally possible to achieve the profiles required to fabricate micromachine devices such as pressure sensors, accelerometers, ink-jet printer heads, precision spectro-photometer slits and micromotor components.



62. UCLA MEMS site

This site contains, among other things, an album of some interesting SEM photographs and pictures of 3-D microstructures, a list of MEMS publications by people at UCLA (abstracts and request form), the preliminary UCLA MEMS major field announcement, a description of the UCLA Nanofabrication Research Facility (UCLA NRF), a model of silicon crystal, FAQ on XeF2 as silicon etchant.


This site also contains a tutorial short course on MEMS at


Others can be found at


63. The Electrochemical Society, Sensor Division

The focus of the Sensor Division is chemical sensors, with secondary emphasis on biosensors, physical sensors, and the processing technology of microelectromechanical systems (MEMS).


64. Journal of Micromechanics and Microengineering

This journal is available from the Institute of Physics Publishing. It covers microelectronics and vacuum microelectronics, this journal focuses on fundamental work at the structural, devices and systems levels, including new developments in practical applications.


65. CSEM Centre Suisse d'Electronique et de Microtechnique SA

CSEM's mission is to generate new high-tech business, based on leading-edge know-how and expertise in microelectronics, microtechnologies, related systems and materials.


66. National Nanofabrication Users Network

The National Science Foundation has established the National Nanofabrication Users Network (NNUN) as an integrated partnership of user facilities with the objective of providing opportunities for researchers to turn new ideas in nanoscale science and technology into experimental reality.


67. LIGA News

LIGA newsletter of the International LIGA Community at Institute of Microtechnology (IMM) Mainz

LIGA news is a newsletter devoted to a microfabrication process technology. It's purpose is not to make a new scientific journal, but above all to exchange information and experience on what is going on worldwide in LIGA, on work in progress, on new patents or patent applications, on new LIGA microstructure products, on new materials, equipment, labs and facilities.




68. The Micromechanical Transducers Group (MicMec) of the University of Twente

The Micro Mechanical Devices group (better known as: "MicMec"), conducted by Prof. M. Elwenspoek, is part of the MESA Research Institute at the University of Twente, The Netherlands. It is one of the leading groups in the world in the field of Micro System Technology (MST) in general and MicroElectroMechanical Systems (MEMS) in particular.


69. University of Sheffield, UK, MEMS Unit Homepage

Extensive information about current MEMS research including rotating microgyroscope, micro-speaker for hearing aids and micro-electric generator for implantable microsystems.



70. Institut für Feinwerktechnik, Dresden

Present teaching and research activities deal with the development, design and manufacturing of automated precision devices for use in production and manufacturing. Especially their mechanical, optical, electrical, electronic, microtechnological and computer and control components are in the focus of our activities.


Technische Universit?t Dresden Institut für Halbleiter- und Mikrosystemtechnik.


71. Redwood Microsystems

Redwood MicroSystems is a world leader in silicon microvalves and microvalve-based pressure regulators and mass flow controllers. These valves are based on patented thermo-pneumatic Operating Principles which provide a tremendous amount of actuation force from an incredibly small silicon chip. Redwood's products offer benefits in size, cost and performance versus pressure and flow regulators using conventional solenoid valves.


72. The Asian Technology Information Program (ATIP)

Non-profit organization dedicated to providing objective and high-quality information about technology developments in Asia. It contains many interesting MEMS references that can be found by searching their public reports using MEMS as the key word.


Search their public reports.



Micromachines and Microsystems Laboratory of the Department of Mechanical Engineering of the Korea Advanced Institute of Science and Technology .


74. Institute of Microtechnology, University of Neuchâtel

The IMT focuses its educational and research activities on the following fields:

Microelectronics, sensors and actuators (Prof. Dr. Nico de Rooij),

Applied optics (Prof. Dr. RenŽ D?ndliker)

Physical electronics (Prof. Dr. Arvind Shah)

Electronics and signal processing (Prof. Dr. Fausto Pellandini)

Pattern recognition (Prof. Dr. Heinz Hügli)




The Sensors, Actuators and Microsystems Laboratory (SAMLAB) of the Institute of Microtechnology of the University of Neuchâtel


75. Georgia Institute of Technology

This site contains links to all of Georgia Tech's research labs. There are many having to do with electro-optics as well as the GA Tech MEMS Home Page.


MEMS home page


Solar cell array for MEMS power supply

A miniaturized high voltage solar cell array as an electrostatic MEMS power supply .


76. LETI Laboratory of Electronics, Technology and Instrumentation

LETI, laboratory of the CEA's Direction of Advanced Technologies, is a European applied research laboratory in electronics. Its main mission is to help companies to improve their competitiveness, through technological innovation. About 85 % of its activity is dedicated to researches, finalized with partners outside CEA.


77. Silicon Light Machines (formerly Eschelle, Inc.)

Silicon Light Machines' unique Grating Light Valve technology represents an approach to manufacturing high-resolution, high-contrast, and bright displays. The GLV technology is based on simple physical principles, and can be manufactured using conventional silicon-based manufacturing technologies. The GLV technology was originally developed and patented by Professor David Bloom and his students at Stanford University. To create a GLV device, Micro-Electromechanical (MEMS) techniques are used to form pixels on the surface of a silicon chip.


78. Mechanical Engineering Laboratory of MITI

Research at MEL is carried out on the following seven main areas

1.Materials Science and Technology


3.Information and Systems Science

4.Advanced Machine Technology

5.Energy Technology

6.Manufacturing Technology



79. Bartels Mikrotechnik GmbH

Bartels is a supplier of microproducts such as microgrippers.


80. SPIE, the International Society of Optical Engineering


81. Interessengemeinschaft zur Verbreitung von Anwendungen der Mikrostrukturtechniken NRW e.V. (IVAM NRW e.V.)

This page provides information about companies and research organizations working in the field of microtechnology. All organization listed are members of IVAM NRW e.V. Detailed information about addresses, products, services and more is provided. A search engine can be used to find the desired information.


82. Institute for Microsensors, -actuators and -systems (IMSAS), University of Bremen

IMSAS founded in 1992, has its focus in Research and Development on miniaturized multifunctional systems and system-related components, such as sensors and actuators. Cleanrooms are available for silicon-processing, including bulk- and surface-micromachining and processing of non-silicon materials, such as ceramics on glass. IMSAS works in close cooperation with institutes at the university engaged in circuit design, power electronics, HF-techniques, and materials science


83. Forschungsverbund Mikrosystemtechnik, Erlangen-München-Passsau


84. Mechatronics Linz Home Page, Johannes Kepler University of Linz, Austria


85. Mechatronics around the World

List of mechatronics related sites


86. Electromechanical, Systems Laboratory, Department of Mechanical and Industrial Engineering , University of Massachusetts Amherst

Research activities at the Electromechanical Systems Lab are focused on the design, analysis, and implementation of "smart" electromechanical components, structures, and systems for enhanced condition monitoring and intelligent manufacturing. The development is centered around a mechatronics approach, striving for a synergistic integration of mechanical engineering, electronics, controls, and computer engineering.


87. The Stanford Transducers Laboratory

This laboratory operates under Professor Greg Kovacs of the Electrical Engineering Department. The interdisciplinary group is dedicated to the development and application of micromachined sensors and actuators.


The Miller Group at Stanford University has many different areas of active research. Current activities include

Wavelength-sensitive photodetectors

GaAs optical receiver arrays

Optically controlled optical gates

GaAs optical modulator arrays

Wavelength division multiplexing of femtosecond pulses

Optical fiber data transmission

Volume Holographic Data Storage


The Center for Design Research (CDR) is dedicated to facilitating individual creativity, understanding the team design process, and developing advanced tools and methods that promote superior design and manufacturing of products.


Stanford Nanofabrication Facility, SNF

The National Science Foundation (NSF) has created a network of universities referred to as the National Nanofabrication Users Network (NNUN). Stanford University is in partnership with four other universities (Cornell, Howard, Penn State, and UCSB) to create this network that provides researchers opportunities to turn new ideas for the fabrication of nanoscale structures into experimental reality.


88.University of Michigan Center for Neural Communication Technology

The University of Michigan Center for Neural Communication Technology, directed by Professor David J. Anderson, began in May 1994 with funds from the NIH National Center for Research Resources . The Center was initiated to obtain resources necessary to meet the increasing demands for multichannel silicon substrate microprobes fabricated at the University of Michigan Center for Integrated Sensors and Circuits. These probes are being developed for acute and chronic recording and/or stimulation of the central nervous system.


89. Microengineering and MEMS. Danny Bank's web site.

This document contains some useful introductory links for microengineering and microelectromechanical systems (MEMS). Most of the documents linked deal primarily with micromachining.


90. MicroElectromagnetics Device Group

This is the WWW home page describing on-going research performed under the supervision of Dr. Dean P. Neikirk at The University of Texas at Austin


91. UCLA

Index of labs/laser/research


Boston University's Precision Engineering Research Laboratory (BU-PERL), under the direction of Dr. Thomas G. Bifano, is dedicated to research on fabrication, control, and measurement at nanometer scales of precision. A core project, supported by DARPA (MEMS), involves building silicon-based deformable mirror systems for pattern recognition and adaptive optics. Another core project, supported by NSF, DOE, and private industry, involves a new process for manufacturing compact disc stampers. A third core project, supported by grants from DARPA, ARO, and industry, involves developing MEMS devices for microfluidic control.


93. OKO Technologies in the Netherlands is a manufacturer of precision multichannel micromachined adaptive mirrors, which provide a unique possibility of fast wave front control in modern optical systems. The company also produces and sells software for optical design, diffraction analysis and hologram synthesis.


94. Electronic Instrumentation Laboratory


95. What is Adaptive Optics?

N. Hubin and L. Noethe

ESO - European Southern Observatory

Karl-Scwarzschild Stra§e 2 D-85748 Garching b. München

Published on Science, Vol. 262, 1345-


96. Keck Adaptive Optics, Links to Other AO Pages


97. The International Society for Optical Engineering


98. OSA Optics Net

Optics and Photonics Research, Applications, and Industry News


99. European Optical Society

The European Optical Society (EOS) serves as the joint forum for all individuals, companies, organisations, educational institutions, and learned and professional societies, who recognise the opportunity and challenge that a common European base provides for the development of optics in its broadest sense. Contains links to other sites of interest.


100. All-Optical Networking Consortium Homepage

The All Optical Networking Consortium was formed by AT&T Bell Laboratories, Digital Equipment Corporation, and the Massachusetts Institute of Technology to investigate architectures for, and build prototypes of all optical networks. The work is funded by the Defense Advanced Research Projects Agency (DARPA).


101. Piezosystems Jena

Contains piezosystem jena news and product information on stacked actuators, compact translation systems for 1D, 2D and 3D motion, special systems and power supplies as well as a FAQ pace about their products.


102. Miura-Shimoyama Laboratory, Department of Mechano-Informatics at University of Tokyo http://www.leopard.t.u-tokyo.ac.jp/

103. Institute of Microtechnology, Mainz

IMM is a non-profit research and development institute, founded and owned by the state of Rhineland-Palatinate, a federal state of Germany. It is located in Mainz, which is the capital of Rhineland-Palatinate and one of the political, cultural and economic centers of the highly developed Rhine-Main area. The ultimate goal of IMM is to transfer innovative ideas quickly and efficiently into marketable products, helping its partners from industry to achieve commercial success.


104. HPTB Home Page (Microelectronics and Photonics Test Bed)

The MPTB is a space experiment launched in 1997 into a high radiation orbit to test performance, reliability, and survivability of new microelectronic and photonic devices and subsystems operating in the space radiation environment. The page is not totally functional.

General Information:

MPTB Introduction: Introduction by Jim C. Ritter

MPTB Overview: Overview of the project

MPTB directory: Email accounts and phone numbers

Onboard Experiments: Information on the experiment payload

SEARCH: Keyword Search of Website


MPTB Data Site

This data site is provided by the Radiation Effects Branch of the Naval Research Laboratory. Individual experimental results are password protected by the experiment provider. However, the password may be obtained from the provider for collaborations. MPTB data is available for the following selections:

Data for all experiment boards in Panel A.

Data for all experiment boards in Panel B.

Data for all experiment boards in Panel C.

CPT Data.

Analog values for each Panel.

Analyzed data and experiment descriptions.


105. The World Technology Evaluation Center (WTEC) [formerly known as The Japanese Technology Evaluation Center (JTEC)] at Loyola

WTEC provide assessments of foreign research and development in selected technologies under a cooperative agreement with the National Science Foundation (NSF). Loyola's International Technology Research Institute (ITRI), R.D. Shelton Director, is the umbrella organization for WTEC. Paul Herer, Senior Advisor for Planning and Technology Evaluation at NSF's Engineering Directorate, is NSF Program Director for WTEC. Other U.S. government agencies that provide support for the program include the National Aeronautics and Space Administration, the Department of Energy, the Department of Commerce, and the Department of Defense.


WTEC includes

Optoelectronics in Japan and the United States


Microelectromechanical Systems in Japan


JTEC Panel Report on Microelectromechanical Systems in Japan

This 1994 report is an assessment of MEMS research in Japan. It also contains site reports on many university and corporate research facilities.


106. FSRM, The Swiss Foundation for Research in Microtechnology

FSRM is an independent non-profit organization in the field of microtechnology. It promotes the research results and the transfer of R&D outputs in industry. It offers short courses for specialists in industry and research, support for establishing partnership, administration and logistic assistance, information about international projects, all microtechnology related information. It operates in Switzerland and Europe.


107. Network of Excellence in Multifunctional Microsystems (NEXUS)

NEXUS is the European Network of Excellence in Multifunctional Microsystems, bringing together European expertise and R&D resources in microsystem technology (MST). Its organizational structure includes an Industrial Working Group, a Coordination Board (CB), the General Assembly, and a permanent network office. Specific tasks are carried out by task forces established by the CB. Current activities comprise the strategical assessment of MST development world-wide, the formation of industrial links to SMEs, research coordination, training and education, pubic relations, and a communication infrastructure.


108. Electronics Laboratory (LEG) of the Swiss Federal Institute of Technology Lausanne (EPFL)

The Electronics Lab. is part of the Electrical Engineering Department of the Swiss Federal Institute of Technology in Lausanne (Ecole Polytechnique FŽdŽrale de Lausanne or EPFL). It is directed by Prof. M. Declercq in collaboration with Prof. E. Vittoz and Prof. P. Fazan. The research team includes about 40 collaborators among which 21 Ph.D. students.


109. NRL Spacecraft Development Section


Other pages at this site that are MEMS related are;

Advanced Fiber Optic Sensing at


110.Allegro MicroSystems, Inc.

Allegro MicroSystems, Inc. specializes in the design and manufacture of advanced mixed-signal (analog + digital) integrated circuits including Hall effect sensors.


111. Baumer Electric, Ltd.

The product range includes: inductive and Capacitive sensors, photoelectric sensors, light barriers, incremental and absolute encoders, counters, resolvers, electronic hand wheels, ultrasonic sensors, pressure sensors, My-Com precision switches, mechanical programmable limit switches, tag identification systems and components designed to connect to the bus system AS-i (AS-Interface).


112. The Zeneca/SmithKline Beecham Centre for Analytical Science, Department of Chemistry

Imperial College of Science, Technology and Medicine

South Kensington, London SW7 2AY, U.K.

This section of the Department of Chemistry was established in 1995 to cover a wide range of analytical techniques, from well established methods like liquid chromatography or capillary electrophoresis to novel concepts like the Miniaturized Total Analysis System (µTAS), using microsystem technologies to integrate sample treatment, separation and detection onto a single chip.


113. SRI Consulting, Business Intelligence Center

TechMonitoring provides continuously updated evaluations on technology breakthroughs, alliances and new ventures, R&D funding, timetables on the markets and commercial developments, cross matrices of the major players and their specialization, and key applications. Monitored technology areas of particular interest include biosensors, fiber optic communications and sensors, micromachining, optoelectronic systems and circuits, robotics, smart materials and solid state microsensors, among others.


114. TWI, World Centre for Materials Joining Technology

TWI's Microtechnology Center is a member of the Europractice Microsystem Project, working with the UK Manufacturing Cluster (MC3). The MC3 cluster specializes in providing a wade range of services geared to taking microsystems products from concept to manufacture.


115. MAZeT Online

Center for design of integrated electronic systems and components. Established in 1992, MAZeT develops electronic components and systems for industrial automation and communications applications. There are specialized divisions for application-specific integrated circuit (ASIC) design, boards and software.


Other links on MAZeT can be found on


These links include:



PCI Special


Automation Online







Fujitsu Electronic Devices in Europe



Lucent Technologies(AT&T)



Texas Instruments

Thesys Gesellschaft für Mikroelektronik mbH


ZMD Zentrum Mikroelektronik Dresden GmbH



Phoenix Contact

SICAN Hannover



Electronic Tools

Regional links;

Thüringen - Das grüne Herz Deutschlands

Erfurt informiert

Erfurt, Landeshauptstadt des Freistaates Thüringen

Kaisersaal Erfurt

Jena informiert

Thüringen Online

Thüringen Online (Ministerium für Wirtschaft und Infrastruktur

116. Research Center "VIBROTECHNIKA" at the Kaunas University of Technology, Lithuania

RC "Vibrotechnika" was founded in 1970 as a center for basic and applied research of Precision Engineering funded mainly by SU Space and Military agencies. It became a main center in the former Soviet Union in the fields of Precision and Ultraprecision Engineering based on the smart materials like piezoelectrics, magnetostrictives, etc. The RC "Vibrotechnika" specializes in precision positioning systems and measuring instruments.


117. J?rg Albrecht's MST/MEMS page


J?rg Albrecht's List of MST/MEMS Sites

Disclaimer: This list is not well ordered yet, and not all links have been checked for their correctness! Hence, you might possibly encounter outdated/moved or even incorrect dead-end links (misspellings, targeted web-server does not exist anymore, or the like.)


118. Laboratory for the Integration of Sensors and Actuators (LISA)

LISA is a laboratory of the Engineering physics Department of École Polytechnique of MontrŽal, which is an affiliated school of UniversitŽ de MontrŽal in MontrŽal, QuŽbec, Canada.


119. Caliper Technologies Corporation

Caliper, "The Lab on a Chip Company", utilizes microfluidic technologies to integrate complex laboratory procedures on a microchip. Caliper's LabChipsª will revolutionize the way biochemical information is obtained and interpreted. Applications of Caliper's microfluidic LabChipsª include ultra high throughput screening for pharmaceutical drug discovery, genomics, biomedical research, clinical diagnostics and many others.


Also from Caliper

Affymetrix is dedicated to developing state-of-the-art technology for acquiring, analyzing and managing complex genetic information for use in biomedical research, genomics and clinical diagnostics. Affymetrix' GeneChip technology can be used for a broad spectrum of nucleic acid analysis applications including sequence analysis, genotyping and gene expression monitoring. GeneChip systems will help researchers work more efficiently in their quest to analyze genetic information and meet today's complex scientific challenges.


Aurora Biosciences Company

Aurora designs and develops proprietary drug discovery systems, services and technologies to accelerate and enhance the discovery of new medicines. Aurora is developing an integrated technology platform comprised of a portfolio of proprietary fluorescent assay technologies and an ultra-high throughput screening system designed to allow assay miniaturization.


Incyte Pharmaceuticals combine bioinformatics expertise with high-throughput DNA sequencing to create information-based tools for drug discovery and development. Products include genomic databases, bioanalysis software, biological reagents, and microarray services.


Nanogen is an Electronic Bioassay company specializing in the development of DNA diagnostics, molecular biological analysis, and biomolecular synthesis based on a revolutionary microelectronics technology.


Orchid BioComputer, Inc.


PerSeptive Biosystems


Soane Biosciences

SBio was incorporated in May, 1995 to develop and commercialize STI's pipeline of technologies as they relate to the precise manipulation of liquids in networks of capillary size channels on planar substrates.


120. Sarnoff Corporation

Sarnoff, a subsidiary of SRI International, is well-known for its research and advanced development activities in electronic imaging and the key supporting technologies. These areas include imagers and cameras, image processing and compression, video communications, displays, solid state devices, integrated circuit technology, microwave technology, materials science and biotechnology - both hardware and software.


121. Journal of Microelectromechanical Systems

A joint IEEE/ASME publication dedicated to research in MEMS.


122. MEMS Optical, Inc.

This site contains information on diffractive optics, MEM systems, lenslet arrays, medical imaging, refractive microlens arrays, shaped surfaces, about MOI, literature and a pictoral product summary.


123. Liwei Lin's web site at the University of Michigan

He is involved in design and manufacturing of microsensors and microactuators; development of micromachining processes by silicon surface/bulk micromachining; micro moulding process; mechanical issues in microelectromechanical systems (MEMS) including heat transfer, solid/fluid mechanics and dynamics.


124. microTEC

RMPD, a micro stereo lithography method for rapid creation of 3-D micro structures of any shape as prototypes or for series production. RMPD facilitates the integration of other micro components during generative growth of components in layers of at least 1µm. This method affords entirely new perspectives for layout and connection techniques. Micro electronic, micro optic and micro mechanical components can be connected very simply to build complex micro systems, e.g. CCD chips and micro lenses. microTEC manufactures micro structures and can partner you through all phases of product



125. University of Hawaii at Manoa

UHMEMS, Dr. Eun Sok Kim's Microelectromechanical Systems Lab, located at the University of Hawaii at Manoa.


126. Microsystems Web Page by GEMAC


Inclination sensor (page available only in German)

Application of thick film technique for sensors

Application of piezo actuators

Selection of technologies, design and prototype production

Tools for the Simulation of Orientation Dependent Etching

SIMODE Simulation of orientation dependent etching

QSIMODE Cross-section simulation of orientation dependent etching

Determination of user specific etch rates


Silicon microstructures (page available only in German)

Special wafer service

Literature and related links



The Defense Sciences Office (DSO) is the most diverse office within DARPA not only in mission but in character. Unlike the "systems" offices and the other "technology" offices, each of which has a defined area of concentration and expertise, DSO is designed to be the technological conscience of DARPA. DSO's mission is to identify and pursue the most promising technologies within the basic science and engineering research community and develop them into new DoD capabilities. DSO personnel draw on expertise from many elements-industry, academia, government laboratories, small businesses, and individuals. The scope of the work funded under DSO spans the research and development spectrum from conception to production.


128. Honeywell

LIGA-Based Tunable Optical Filters for Multispectral IR Imagers and Gas Analyzers



Sarcos is an established research and development organization with over 15 years of experience in designing and building innovative robotic systems, medical devices, and micro-systems for practical applications. Sarcos Companies are unique in that they conduct research and development from both a biological and engineering perspective to produce systems unsurpassed in terms of human emulation and dexterous manipulation. An emphasis has been placed on designing specialized systems to fulfill a specific need. As a result Sarcos has built a strong reputation as a reliable and customer-oriented technology group.


130. Veeco

Veeco Instruments Inc. is a leading worldwide manufacturer of precision Ion Beam Etching and Deposition Process Equipment, Process Metrology, Leak Detection and X-Ray Fluorescence systems used in the fabrication of microelectronic components. The Company's global customer base is comprised of leading manufacturers of mass memory storage devices, semiconductors and flat panel displays, as well as a broad range of industrial products, which Veeco serves from 15 facilities in the U.S. Europe and Asia-Pacific.


131. Swedish Royal Institute of Technology, Department of Signals, Sensors and Systems, Instrumentation Laboratory

The Instrumentation Laboratory is a part of the Department of Signals, Sensors and Systems and conducts education in the area of electrical measurements and sensor technology. The research activities are focused on two main areas, silicon sensors and fibre optic sensors.


132. GRASP Lab, University of Pennsylvania

The General Robotics and Active Sensory Perception GRASP Laboratory is an interdisciplinary laboratory located in the Department of Computer and Information Science in the School of Engineering and Applied Science at the University of Pennsylvania. The GRASP Laboratory is directed by Dr. Ruzena Bajcsy and is dedicated to research and education in robotics and computer vision.



Assistant Professor of Mechanical Engineering & Applied Mechanics

The University of Pennsylvania


133. Twente MicroProducts

Twente MicroProducts performs custom design, prototyping and production of microsystems and

microtechnological components. Twente MicroProducts has established a special arrangement with Philips,

gaining full access to high volume production facilities. This unique combination offers ISO 9001 qualified

high volume production (100.000 6" wafers / year) of fully packaged systems combined with expertise in OEM design and prototyping


134. The Microsystems Technology Program (PMT) was established in 1992. About 250

scientists and technicians in seven institutes and main departments of the

Forschungszentrum Karlsruhe are engaged in the following research areas:

Microstructuring technologies

Materials and effects

Systems technologies

Chemical microanalysis systems

Physical microsensors and -actuators


Microprocess engineering

Manufacturing technologies for microsystems

and within the main activity Medical Technologies microsystems and micro components are developed for medical applications


135. CMP, Circuits Multi-Projects

CMP is a broker in Integrated Circuits, MEMS and MCMs fabrication for a number of technologies for prototyping and low volume production. ICs, MEMS and MCMs are fabricated for Universities, Research Laboratories and Industrial Companies.


136. Microcosm Technologies, Inc.

A provider of CAD software and services for the MicroElectroMechanical Systems (MEMS) industry. They offer a broad solution set for MEMS design, system simulation, manufacturing analysis, and packaging. This site also has links to many other sites of interest.


MEMCAD Home Page

MEMCAD is a project to develop CAD systems, techniques and algorithms for Microelectromechanical Systems. Groups involved at MIT are; the Senturia Group, the White Group and the Schmidt Group. Sandia is also involved.


137. Materials Research Society

Materials Research Society is dedicated to goal-oriented basic and applied research on materials of technological importance. MRS emphasizes an interdisciplinary approach to materials science and engineering, inspiring cooperation among scientists from industry, academia, and government


138. Industrial Microelectronics Center

IMC combines the need for expertise in technology and market demands, to make research findings available quickly in competitive products. This also has links to other MST sites.


139. IMFT Institut für Feinwerktechnik , Technische Universit?t Wien (In German)

Das Institut für Feinwerktechnik der Technischen Universit?t Wien unter der Leitung von Univ.-Prof. Dr. H. Detter sieht seinen besonderen Schwerpunkt seit jeher in dem Transfer und der Applikation von feinwerktechnischem Know-how für die?sterreichische Industrie. Seit 1991 wurde der Bereich Mikro(system)technik aufgebaut, wo das IFWT in Österreich Alleinstellungsmerkmal aufweist und mit zahlreichen namhaften internationalen Institutionen kooperiert.


140. SUSS

SUSS is a leading semiconductor equipment manufacturer, supplying process and test equipment to the semiconductor industry, including

Spin Coaters for wafers and substrates

Mask Aligners for microlithography

Substrate Bonders for Microsystems Technology production (MEMS)

Flip Chip Bonders for advanced packaging

Probe Systems for failure analysis and testing

141. What Is...smart matter (a definition)

This page defines 'smart matter,' provides a brief overview, and lists research organizations and companies that develop or make micro-electromechanical products. It also contains some links to related sites.


MUMPs (multi-user MEMS processes)

MUMPs is a program that assists companies and academic researchers with ideas for micro-electromechanical systems (MEMS) to manufacture prototypes. Since the manufacture of silicon chips in which MEMS are imbedded is costly, MUMPs provides special manufacturing "runs" that qualified enterprises can be part of. MUMPs is administered by the MEMS Technology Application Center (MCNC). A MEMS Technet and MUMPs Newsletter is available.


142. MEMS Strategic Research Programme, Nanyang Technological University, Singapore

The Center of MEMS in NTU (Nanyang Technological University, Singapore) aims to be a Center of expertise in Asia and to support MEMS-Technology in Singapore. This site also has a good list of other sites.


143. am-Trung Nguyen's Yellow Pages

Microsystem Technology Yellow Page . Select the first letter of the item of which you would like to look up information. This is an excellent list of related web sites.


144. OSA Optics Net

Optics and photonics research, applications, and industry news


145. Miura-Shimoyama Lab

Department of Mechano-Informatics, The University of Tokyo


146. Institute for Defense Analysis MEMS Technology Transfer

Sponsored by DARPA

This site identifies transition opportunities for MEMS technology into defense systems.


147. Coyote Systems

Coyote Systems provides a set of 2D and 3D computer aided Modeling and analysis tools for the design of micro electro mechanical systems (MEMS). These tools employ the technology based on the boundary element method.


148. InterScience, Inc.

Founded in 1980, InterScience performs technology-based contract research and development. The staff includes specialists with advanced degrees in a variety of physical sciences and engineering disciplines. They work together as interdisciplinary teams to develop and commercialize wide ranging practical applications of advanced technology. Current projects involve plasma physics, electro-optics, microelectromechanical systems (MEMS), image processing, design and implementation of digital and analog electronic systems, and other areas of science and engineering.


Micro-Opto-Electro-Mechanical Systems (MOEMS)


149. International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators


150. Tanner EDA

Tanner develops tools for IC, MCM, and MEMS design. Chips designed from this library can be fabricated by a variety of vendors in double-metal CMOS-bulk technologies ranging from 2µm down to 0.8µm. The library supports MOSIS design rules and a variety of vendors including AMI, ES2, Hewlett-Packard, Orbit Semiconductor, US2, and VLSI Technology. The designs are compatible with MOSIS, a silicon brokerage service that can return prototype chips in seven weeks for as little as $520.


151. SEMI

An international trade association serving the semiconductor and flat panel display industries.


152. Aclara BioSciences, Inc.

Microfluidic devices for genetic analysis, drug screening and optimization, and clinical diagnostics. These areas require analytical processes to be implemented at industrial scale, with large numbers of samples being processed in parallel. Most of these analytical processes can be miniaturized and integrated by microfluidics, thereby providing order-of-magnitude or greater cost reductions and efficiency improvements on several levels.


153. Office of Naval Research

ONR MEMS Component Database

The information at this web site is provided as a convenience for the research community. The Office of Naval Research (ONR) does not guarantee the accuracy of the data contained within. This database is for information purposes only and does not imply endorsement by the U.S. Government or any of its departments and agencies, including ONR.


Broad Agency Announcements and Other Funding Opportunities


154. DoD Commercial Operations and Support Savings Initiative (COSSI)

The mission of the Commercial Operations and Support Savings Initiative (COSSI) is to develop and test a method for reducing Department of Defense (DoD) Operations and Support (O&S) Costs by routinely insert commercial items into fielded systems.. Selected proposers will develop, manufacture, and deliver prototype "kits" to the military for installation into a fielded DoD system. Each kit will consist of a commercial item, or a combination of commercial items, that has been adapted, qualification-tested, and readied for insertion or use in a fielded military system.


155. Fluid Dynamics Links

This service is an informal listing of current links to sites of interest to students and researchers in fluid dynamics. It is permanently under construction. It contains links to;

Links to Links



Weather and Climate

Instructional Material

Data Sources and Projects

Professional Organizations

Federal Research Funding Agencies

Key Government Sites

Individual Sites

Jobs in Fluid Dynamics


156. Center for Integrated Space Microsystems, NASA Center of Excellence

The goals of CISM are to;

Develop and maintain a world class, leading edge capability in advanced avionics systems and advanced microelectronics technologies for future highly integrated, miniaturized, autonomous spacecraft for deep-space and Earth orbiting missions.

Establish and maintain a world class, leading edge facility for the design, development, rapid prototyping, and integration of highly capable autonomous microsystems that include all spacecraft electronics and photonics.

Establish and maintain world class program to research revolutionary computing architectures that will take us beyond the limits of semiconductor technology scaling, e.g. quantum computing, holographic storage, optical communications, etc.


157. Lucas NovaSensor

Lucas NovaSensor, is a business of Lucas Control Systems, which is part of Lucas Varity's Electrical and Electronic Systems division, a supplier of advanced electronics, wiring systems and electric systems.


158. Dartmouth College -- Thayer School of Engineering

The Dartmouth Solid State Microengineering Laboratory includes class 100 and 1000 cleanroom laboratories, located in room 223 of Cummings Hall at the Dartmouth College Thayer School of Engineering in Hanover, NH, 03755-8000. Currently funded research includes applications in microelectronics, micromachining, and binary optics. Equipment is available for photolithography; e-beam lithography; wet chemical processing; film deposition and processing; analysis; and design, layout, and simulation.


159. University of California, Irvine, Microtechnology & Manufacturing Laboratory (UCI MML)

The MML is equipped to support research and development, prototyping, and small-scale manufacturing in the areas of (1) silicon and compound semiconductor microelectronic devices, (2) silicon micromachining, and (3) microscale fabrication. The MML


Electro-optical detectors, Microelectromechnical Systems (MEMS) and Laser processing


Motorola's SENSEON sensors family provides a portfolio of silicon micromachined smoke IC, pressure, and acceleration sensors.


161. LISA

Information on the Laboratory for the Integration of MEMS Sensors and Actuators Department of Engineering Physics at Ecole Polytechnique de Montreal conducted by Professor John F CURRIE. LISA is involved in four principal research domains which are not separated with walls. In fact, work done in a field solves problems encountered in another research pursued. Those research themes are high-speed microelectronics, gas sensors, physical sensors and micro-electro-mechanical systems, materials science. Project areas include;

High-speed microelectronics

InP-based III-V Devices

Gas sensors

Gas Sensors and Membranes

Physical sensors and micro-electro-mechanical systems

Magnetic Sensors

MEMS: Micro-electro-mechanical Systems


Materials science


Porous Silicon




162. Department of Electrical and Computer Engineering , The University of Texas at Austin.

Experimental Operation of the Quantum Well Injection Transit Time (QWITT) Diode.

DC and microwave characteristics of different QWITT structures are discussed. Quantum well oscillators have been shown to be capable of generating power at high millimeter wave frequencies [1, 2], and there has been expectation that these devices could serve as a useful local oscillator at frequencies between 100-1000 GHz. However, there has been considerable debate over the quantum well device structures that must be used to maximize the output power obtained from these devices.


There are also links and resources for MEMS related information at


163. ERL MEMS Interconnect Design

They are investigating MEMS designs for applications in high bandwidth optical routing, optical scanners and laser radar, and high speed digital switching and RF electrical signal routing.

164. The Center for Microelectronic Sensors and MEMS (CMSM) at the University of Cincinnati

This center is equipped with facilities to research the design, fabrication, and characterization of Micro-Electro-Mechanical Systems (MEMS) structures and devices on chips with integrated circuits. Three core faculty members (and several inter departmental associates) are working together on MEMS research, including 25 graduate students plus another 10 students in affiliated departments and colleges. Recently, the CMSM has been awarded a DARPA project of $2.6 M for the development of MEMS-based microfluidic systems and remote sensors.


165. HEDCO Microengineering Laboratories University of Utah College of Engineering.

The HEDCO Microengineering Laboratory is a central micro engineering cleanroom facility for the University of Utah and participating industrial partners. The facility includes over 5500 square feet. of class 100 - class 10,000 cleanroom space as well as state-of-the-art processing equipment for conducting research in a wide variety of microengineering related areas.


166. The MOSIS Service, Information Sciences Institute, University of Southern California.

MOSIS is a low cost prototyping and small-volume production service for VLSI circuit development. Since 1981, MOSIS has fabricated more than 32,000 integrated circuit designs for commercial firms, government agencies and universities.


167. Technical University of Berlin, Microsensor & Actuator Technology Center.

The Microsensor & Actuator Technology Berlin (MAT) is part of the research unit "Microperipheric Technologies" of the Technical University of Berlin and was founded in 1987. Prof. Dr.-Ing. E. Obermeier is the head of the MAT. Today more than 30 research scientists are working on the field of sensor and actuator development. Main topics are the development and realization of sensors for measurement of pressure, force, acceleration, temperature, humidity, gas flow and gas concentration. Modern computer aided design methods (like FEA) are used to optimize the sensor characteristic. The cleanroom facilities include standard CMOS processes and numerous special processes, e.g. anisotropic etching, electrochemical etching and anodic bonding. Computer controlled test systems are used to characterize the devices.


168. The MISTIC TCAD Home Page.

MISTIC (Michigan Synthesis Tools for IC's) is a planar process compiler for thin-film and micromachined devices. This tool automatically generates fabrication process flows starting from a two-dimensional geometrical device description. The synthesis method used is based on topological sorting techniques which find all possible flows for the device. An optimal flow is selected which maximizes the device yield.

169. University of Southampton Microelectronics Centre MEMS Group.

The Microelectronics Center at Southampton University has been in existence for about 20 years. Sensors research has always been a key point of their activity and in the last 15 years micromachined "MEMS" devices have formed an important research area. They have made a variety of micromachined devices in collaboration with other University researchers and Industry.


170. University of Heilbronn, Department of Electronics and Mechatronics, Study of Micro and Precision Engineering. Micro- and Precision Engineering


171. "A Survey of Micro-Actuator Technologies for Future Space Missions" by Roger A. Gilbertson and Ron D. Busch, Presented at the conference "Practical Robotic Interstellar Flight: Are We Ready?", August 29 - September 1, 1994 New York University and The United Nations, New York City.


172. TABATA Lab.

This laboratory is aiming at establishment of process and instrumentation technologies in the region of micrometer and nanometer scales, together with application to micrometer and nanometer scale machines. The research fields:

Micromachining technology

Instrumentation and Evaluation technology

Application to MEMS (Micro ElectroMechanical Systems)


173. The Catholic University of Louvain, Belgium

This site contains information about microsystem technology work in general, and micro electro discharge machining in particular.


174. Spraychip Systems Corp.

SprayChip Systems Corp. specializes in engineering and producing precision micromachined spray devices. The main advantage of these spraychip products is much better control of critical spray parameters than conventional spray devices can offer.

These web pages are currently in development but a company description and contact information is given.


175. Microtechnology Center, University of Minnesota

The Microtechnology Laboratory (MTL), is an interdisciplinary facility that supports faculty and industrial research within the Institute of Technology to support education, research and industrial collaboration in microelectronics and other related research involving microfabrication. Some of the current technologies being researched at MTL are surgical microinstruments and bioanayltical microsystems


U of M MEMS-Program

The University of Minnesota Center for Micro Electro Mechanical Systems (MEMS) was formed in 1992 through NSF funding to provide multi-disciplinary education and research infrastructure development in MEMS.


176. Draper Laboratory

Draper is as an independent, not-for-profit laboratory engaged in applied research, engineering development, advanced technical education, and technology transfer. They are involved in ultra miniature microphones, accelerometers, guidance, navigation, and control, electronic design and sensor development.


177. CFD Research Corporation

CFDRC provides advanced software tools for modeling, simulation, and design of MEMS. Their software has been used for the analysis of a wide variety of physical phenomena such as fluid flow, heat transfer, combustion, and fluid-structure interaction. Industrial applications include MEMS, electronics packaging, semiconductors, turbomachinery, and automotive engineering.


MCNC also provides information on CFDRC in their TechNet section at


178. Alcatel

Alcatel Comptech produces thin film systems for selected deposition and etch applications in the thin film head and microsensor markets. They make deep Si etch equipment for MEMS fabrication.


179. Microfabrication Applications Laboratory (MAL) at the University of Illinois at Chicago

MAL is a research and development laboratory dedicated to the application of integrated circuit and fiber optic technology to improve manufacturing methods for microfluidic, electromechanical, mechanical, chemical, optical and multi-functional devices, some of which have previously been built by more traditional techniques.


180. IntelliSense Corporation

IntelliSense Corporation provide MEMS and micromachine based solutions. They provide custom micro-silicon micro-optics solutions for a wide range of applications. In addition, they develop and provide CAD tools for the design and modeling of MEMS.


181. MEMS Laboratory at DalTech


182. Research Triangle Institute

RTI helps coordinate technology briefings and workshops that are designed to initiate commercialization of promising technologies. These events provide a forum for industry to discuss technical and licensing issues with technical and legal staff. Briefings are your best opportunity to investigate every aspect of a technology that could enhance your business. Some briefings are held as stand-alone events, and some are held in conjunction with industry trade shows.


This page also contains a link to the Glennan Initiative - NASA Lewis Research Center / Case Western Reserve University

The Glennan Microsystems Initiative is a unique public-private partnership that addresses the research, development, and application needs of NASA and industry in the field of microfabricated sensors and actuators. The Initiative will focus on physical/chemical sensors and actuators with a particular emphasis on harsh environments. Examples of such environments include high temperatures and pressures, large stresses/strains, large vibrations, rotating parts and corrosive media. The Initiative will develop prototype microsystems for manufacturing and technology intensive companies and for NASA to meet mission requirements.


183. TIMA MiCroSystem Group Homepage

The MiCroSystem Group (MCS) within TIMA laboratory, in Grenoble - France, is involved in the development of manufacturing techniques and CAD tools by the wish to make microsystems accessible to non-specialized institutions. In addition, the MCS group answers to the needs of the industry in the design of microsystems for safety critical and harsh environment applications targeting mainly medical, aerospace and high temperature domains. The MCS group collaborates extensively with both industry, research laboratories and universities, and emphasis on the ability to work on medium term industrial projects.


184. Paratronix

Paratronix is a supplier of parylene conformal coating service and machinery. Parylene coating is a specialized process used to apply a thin coating of parylene polymer to the irregular surfaces of plastic or metal products. This process uses the dimer form of parylene and then converts it to a monomer by pyrolysis. The parylene is vacuum deposited on the part and coated as a polymer. The coating thickness is controlled by pressure, temperature, and the amount of dimer used. This coating is used both to strengthen syntactic foam parts and, in some applications, slow down the water adsorption rate on molded desiccant products.


185. "Future Applications of Micro/Nano-Technologies in Space Systems"

By A. Martínez de Aragón Technical Directorate, Systems and Programmatics Department, System Studies Division, ESTEC, Noordwijk, The Netherlands

The reduction of costs for a given performance is a major goal of space systems technologists. Extreme miniaturisation, by reducing the levels of resources required, is a possible solution. Micro/nano-technologies allow the production of multiple types of microdevices and their integration into microsystems, resulting in application-specific integrated microinstruments. In recognition of their importance, ESTEC and Industry held a Round Table on Micro/Nano-technologies for Space. Based on the conclusions and recommendations made at the meeting, activities are proposed to gradually introduce these technologies in space-based systems.


186. Frost & Sullivan

Frost & Sullivan Market Engineering Newsletters provide a source of strategic information and ideas. The newsletters are focused on the strategic implications of market trends, technologies, and measurement trends in the industry. Their worldwide consulting teams work on a real time basis to provide strategic insights, ideas, and recommendations to their subscribing clients. Searching their site for "mems" gives many market surveys that are available on line.


187. Distributed Microsystems Laboratory, University of Kentucky

Distributed Microsystems at the University of Kentucky are about:

Arrays of sensors containing many, many component sensors

Many sensing nodes containing such arrays of sensors

The biologically inspired design and fusion of sensing nodes

Signal processing split hierarchally between sensing plane and base

Simultaneous tracking and interpretation of stimuli using these nodes


188. Standard Microsystems Corporation

MEMS Production at SMSC's Wafer Foundry

A 2 micron CMOS production line forms the base process for the high-volume production of microelectromechanical systems. Sensors, actuators, and other structures built on silicon can take the step from university-developed prototypes to commercialized production devices. In just the past five years SMSC has produced over 20 million MEMS - type devices. They work with customers to develop processes specific to their devices.


189. University of Louisville MicroFab Home Page

The Microfabrication Laboratory is utilized for both research and instructional purposes. It provides an environment for teaching both the fundamental and current fabrication techniques used to manufacture integrated circuits (ICs), discrete microelectronic devices, MEMS devices such as sensors and actuators, and various electro-optic devices.


190. The MicroOptical Corporation, Optical MEMS Research

The MicroOptical Corporation is presently engaged in contracts with the Department of Defense for the development of optical micro-electromechanical systems (MEMS). Optical MEMS technology can be used to reduce optical systems to integrated circuit scale. MicroOptical's interest is in the development of a highly miniature scanning display system for concealment with in eyeglasses.


191. MEMS Exchange

The MEMS Exchange coordinates a network of fabrication and design centers enabling users to draft a process sequence which crosses the boundaries separating the individual facilities, and is a service made available to the United States community (including commercial, academic, and government organizations) with support from the Defense Advanced Research Projects Agency (DARPA).


192. Advanced Custom Sensors, Inc. (ACSI)

ACSI offers foundry services in MEMS packaging and product commercialization.


193. Coyote Systems

Coyote Systems provides a complete set of 2D and 3D Computer Aided Modeling and Analysis tools for the design of MEMS. These tools employ technology based on the boundary element method.


194. Analog Electronic

Analog Microelectronics offers custom specific solutions for systems in the area of pressure and distance measurement. Basic technologies are MEMS, ASICs, and hybrids. Analog Microelectronics also distributes standard products. These standard product area includes pressure transducers (calibrated, compensated, media compatible) and a wide range of sensor signal conditioning standard ICs.


Institute for MEMS and VLSI Technologies, George Washington University


196. Nielsen Engineering & Research (NEAR)

They provide aerodynamics analysis and design expertise through consulting services and software licenses. NEAR's specialties include launch vehicle aerodynamics, missile aerodynamics, and store separation. NEAR's R&D division specializes in fluid dynamics, CFD, turbulence modeling, MEMS design, and information technologies related to aerospace applications.


197. MEMS Optical Inc

MEMS Optical Inc provides fabrication, design, and product development of diffractive optics, refractive microlens arrays, and micro-electro-mechanical systems (MEMS), including SLM (Spatial Light Modulators), deformable mirrors, shutters, micro-antennas, relays, and accelerometers. Also, medical imaging and diagnosis software.


198. Complex Systems/Bioelectronics (Uchikawa, Furuhashi Laboratory)

Bio-Electronics Laboratory, Dept. of Information Electronics

Nagoya University, Nagoya 464-01, JAPAN


199. Experimental Aerodynamics Research Group at the University of Florida

They are conducting an investigation of the use of Micro Electro Mechanical Systems (MEMS) to control the low Reynolds number flows about Micro Air Vehicles (MAVs) MAVs are defined as air vehicles with characteristic lengths less than 6 inches. The Reynolds numbers for these flows are less than 100,000. Anticipated benefits from this research are improvements in MAV aerodynamic performance as well as the development of mechanisms for vehicle flight control. See their pointer to mav_mems at the following address.


200. Microphotonics Lab Home Page

Dept. of Electrical and Computer Engineering

University of California, Davis

The UC Davis Microphotonics Lab is involved in optics and microfabrication research. They specialize in the following areas:

MicroElectroMechanical Systems (MEMS), with emphasis on applications in displays, fiber-optic communication systems, and optical measurement instrumentation

Opto-electronic materials and their applications

Electrooptics, integrated optics and optical fabrication technology

Optical communication systems

Optical applications in biology and biomedical engineering

Ultrashort pulse nonlinear optics

Femtosecond Optical Pulse Shaping

Nonlinear Fiber Optics

Ultrafast Nonlinear Optics of Materials

Applications of Femtosecond Technology to Advanced Communications Networks


201. University of Illinois at Urbana-Champaign

Microelectronics Laboratory

Research Areas:

Optoelectronic Integrated Circuits

GaAs & InP-based FETs

Long Wavelength Photodetectors

Gallium Nitride

Quantum Effect Devices

Silicon Germanium

Advanced Processing


202. Sheffield Hallam University

Micro-Electro-Mechanical Systems Unit

Sheffield Hallam University Micro-electromechanical Systems (MEMS) Unit, based in the School of Engineering and was established in June 1998 following the arrival of Prof. R.B. Yates. The group has a Class 1000 clean room dedicated to the fabrication of sensors and actuators. A dedicated RF sputterer is used to produce magnetoelastic materials and sol gel technology to produce high quality films of PZT. Both are key components for next generation actuation. The School also has extensive facilities for the growth and charaterisation of Langmuir Boldget films.


203. MEMS sites

Research Centers in Spain

The Institute of Applied Physics (IFA) is a Research Center in the field of Physical Technology dependent of the Spanish Council for Scientific Research (CSIC).


204. Faraday Foresight

This site includes details on Faraday Foresight's current projects and particularly its work with the SMIDGEN Consortium. SMIDGEN is an international consortium that is accelerating the commercial exploitation of micro components and micro systems in the UK. It brings together companies and research organisations to raise technological awareness and market opportunities. A bulletin-board and news service for members of the SMIDGEN Consortium and other interested parties will also be provided.

The New Site is expected to be live in November.


205. Institute for Micro System Technology, Freiburg University, Germany (in German)

This is a very new Institute and part of Freiburg University. It will have 14 Professors specializing in MEMS technology. Right now there are about 5 Professors with their research groups building up the department.


206. NSLS DXRL HomePage

Ultra Deep X-ray Lithography Beamline (x27b) at NSLS (National Synchrotron Light Source, Brookhaven National Lab.


207. The Fraunhofer Institute for Reliability and Microintegration FhG-IZM in Berlin, Germany develops advanced packaging technologies for microelectronic and microsystems applications.


208. Mikroelektronic Center, The Technical University of Denmark (DTU)


209. Silicon Designs, Inc.

Silicon Designs, Incorporated (SDI) designs and manufactures micro-machined capacitive accelerometers, sensors, and microprocessor based systems for commercial, industrial, and military acceleration, vibration, and shock measurement.


210. Technische Universitat Ilmenau, Institut fur Mikrosystemtechnik

The object of the Mikroelwktronik Centret is to establish a Danish education and research center of excellence within microtechnologies.


211. University of Alberta Micromachining Laboratory

This laboratory has concentrated its research on the investigation of commercially produced CMOS Micromachined Devices and sensor systems, and the exploration of possible applications for specific devices. This involves the analysis of detailed characterization measurements of material properties and the performance and reliability of these devices and systems.


212. CNRI

The Corporation for National Research Initiatives (CNRI) undertakes, fosters, and promotes research in the public interest. The activities center around strategic development of network-based information technologies. CNRI is a not-for-profit organization. CNRI is also establishing a distributed processing environment, called the "MEMS Exchange" (see 212), which is composed of multiple, geographically dispersed MEMS fabrication facilities located around the country.


213. EDTN

The Electronic Design, Technology and News Network


214. Analog Technologies, Inc.

Analog is the developer of the Saber analog and mixed-signal simulator. Saber can be used in IC- through system-level simulation of analog, mixed-analog/digital, and mixed-technology devices. The simulator includes MAST, the EDA industry's de facto standard mixed-technology hardware description language. Designers access Saber through the highly interactive SaberDesigner suite of graphical tools. Their goal is to provide design engineers with the simulation tools. In addition to continually upgrading Saber, they have teamed the simulator with leading simulation products in the digital, mechanical and systems arenas.


AutoMM for Saber is a tool available from Analogy's partner, Microcosm Technologies, that generates models for the Saber simulator from finite element method (FEM) and boundary element method (BEM) simulations. This technology automatically incorporates the accuracy of the MEMCAD 3D simulator into MAST models, supports model-based design methodologies, and facilitates effective communication between MEMS device designers and ASIC/IC designers. With AutoMM for Saber and the Saber simulator, the system-level effects of physical design changes in a MEMS device can be determined.


215. The Microsystems Resource Center

A comprehensive, searchable microsystems database. These pages have been compiled as part of the EMSTO project which is sponsored by NEXUS (The European Network of Excellence on Multi-Functional Microsystems)

Instructions for requesting a password can be found at


216. Micromet Instruments

Founded in 1982 by an MIT research group, Micromet Instruments is a supplier of dielectric measurement instrumentation to the polymer processing industries. The primary application of Micromet's instrumentation is the in-process cure monitoring of thermosetting resins and composites. Other applications include monitoring the drying, curing, and diffusion properties of paints and coatings, and the analysis of oils and lubricants. Micromet instrumentation utilizes sensors which may be located in actual processing environments enabling measurements to be made in presses, autoclaves, ovens, and other processes. Micromet's various product lines are used for laboratory analysis, process development, QA/QC testing, and real-time process control.


217. Cepheid Incorporated

The integration of advanced microinstrumentation and micromachining technologies with complex diagnostic systems forms the base on which Cepheid was founded in early 1996. Cepheid's goals are, first, to dramatically reduce the size and increase the speed of key diagnostic instrument components and subsystems by combining the benefits of micromachining technology with recent advances in instrument technology; then, to design and produce fully integrated bioanalytical test systems, with broad market applications ranging from human infectious disease and cancer diagnostics, food quality testing, and environmental testing, to research and development activities in molecular biology.


218. Plasma-Therm

Plasma-Therm is engaged in the design, manufacture, support and sales of thin film etching and plasma deposition systems. Plasma-Therm sells this equipment directly to manufacturers of:

Photomasks (semiconductor)

Thin film heads (disk drive)

Optoelectronics/telecommunications devices (compound semiconductor)

Microelectromechanical (MEMS) devices

The industrial research & development community


219. Karl Suss

Suss is a manufacturer and supplier of precision microelectronics equipment for the manufacturing and R&D environments. These include mask aligners, bonders, flip chip bonders, spin coaters and probe systems for the MEMS, advanced packaging and semiconductor markets.


220. ENOPTIK Mikrotechnik GmbH

ENOPTIK selps commercialization in microsystem technologies by developing and producing X-ray exposure systems for the LIGA technique and hot embossing machines. They do not only deliver complete production systems but act as partners for microsystem technology applications, component fabrication, training and project management of projects in microsystem technology.


Integrated Sensing Systems (ISSYS)

ISSYS develops and produces pressure and flow sensors and sensing systems. Their products provide high accuracy, small sizes, and corrosion resistance.


222. Center for Applied Technology (CAM)

CAM is a joint activity of the University of Washington and the Washington Technology Center. It provides education for, and supports technology based research, promoting microtechnology and the microtechnology industry in Washington state.


223. Instrumentation Laboratory at the Royal Institute of technology, Stockholm, Sweden.

The Instrumentation Laboratory is a part of the Department of Signals, Sensors and Systems and conducts education in the area of electrical measurements and sensor technology. The reasearch activities are focused on two main areas, silicon sensors and fibre optic sensors. The major research field at the Instrumentation Laboratory is Microelectromechanical Systems (MEMS) with a special focus on applied sensor technology in silicon based on microelectronics fabrication techniques and micromachining of silicon. A significant number of new devices have been fabricated with promising performance.


224. Advanced MicroMachines Incorporated, AMMi

AMMi designs, develops, and produces microsystems for high-value-added, high-performance sensor and actuator markets. Its products are based on microelectromechanical systems (MEMS) technology.


225. Microvision, Inc.

Microvision is a developer and supplier of electro-optics technologies that enable the development and manufacture of high performance visual displays, image scanners and related products. Virtual Retinal Displayª (VRDª) technology is the key innovation that Microvision has targeted to dominate the personal display category.


226. The Tel-Aviv University MEMS Group

The MEMS program at Tel-Aviv University is based on basic and applied research. The basic research is dedicated for new sensing mechanisms for MEMS, and includes two general directions:

Suspended Optical Waveguide Displacement Sensors (SOWDS).

Direct Integration (DI) of solid-state stress sensors with single crystal MEMS.

The applied research is dedicated to the following directions:

Application in fluid dynamics: for example arrays of flow sensors.

Applications in acoustics: for example arrays for acoustical sensors.

Applications in medicine: for example Bio-chip, and micro-sensors and micro-actuators implants.


227. Caliper Technologies Corp.

Caliper Technologies designs and manufacturers LabChipsª and Labchipª systems that enable high-throughput screening for drug discovery, medical treatment, and biological and genetic research.


228. Analog Devices, Inc.

Analog Devices is a semiconductor company that develops, manufactures and markets high-performance integrated circuits (ICs) used in signal-processing applications. The Company's largest single product group is general-purpose Standard Linear ICs (SLICs), which include data converters and amplifiers. ADI has also become a major Digital Signal Processing (DSP) IC supplier, providing both general-purpose DSPs and highly integrated application-specific devices that combine analog and digital signal-processing capability in a single IC. They also have a 6" wafer fab dedicated to the development of Analog Device's integrated microelectromechanical systems ( iMEMS registered trademark ) as well as the development and Analog's accelerometer business.


229. CoreTek, Inc.

CoreTek, Inc. (MA) is a developer of microelectromechanical (MEMs) devices for applications in wavelength division multiplexed communication systems.


230. Optonor AS

The company Optonor AS is located in Trondheim, Norway. Optonor AS, started in April 1997, cooperates closely with the Group of Applied Optics at the Norwegian University of Science and Technology, and with the Applied Optics Group at SINTEF Applied Physics. All together, the Trondheim group has about 30 years of experience in the field of laser based interferometry techniques, and has earlier delivered close to 40 TV-holography systems for research and development applications in Europe, USA and Asia. Optonor's products include a system to perform deformation and vibration analysis on MEMS and small structures.


231. Resonetics

Founded in 1988, Resonetics specializes in micromachining technology for high volume contract manufacturing, production laser micromachining systems and quick prototyping workstations.



Home Pages of Individuals (Listed alphabetically)

Albrecht, J?rg

J?rg Albrecht's MST/MEMS page


J?rg Albrecht's List of MST/MEMS Sites

Disclaimer: This list is not well ordered yet, and not all links have been checked for their correctness! Hence, you might possibly encounter outdated/moved or even incorrect dead-end links (misspellings, targeted web-server does not exist anymore, or the like.)


Aluru , Narayan R.

Assistant Professor, General Engineering Department

Affiliate, Beckman Institute


Ananthasuresh , Suresh G. K.

Assistant Professor of Mechanical Engineering & Applied Mechanics

The University of Pennsylvania


B?hringer , Karl

This page contains information, papers, and animations about manipulation strategies with microfabricated actuator arrays. The electrostatic actuators are fabricated in a single-crystal silicon etching and metallization (SCREAM) process. They were built in the National Nanofabrication Facility at Cornell University.


Horowitz, Robert


Department of Mechanical Engineering

5138 Etcheverry Hall

University of California, Berkeley, CA 94720-1740


Hubbard , Ted

Assistant Professor, P. Eng.

Graduate Coordinator

DalTech MEMS Engineering Design Group


Kolesar , Edward S.

Moncrief Professor of Engineering

Department of Engineering, Box 298640

Fort Worth, TX 76129


PH: (817) 257-7126

FAX: (817) 257-7136


Lin , Liwei

Lin Group Home Page

Professor Lin does MEMS (Micro-Electro-Mechanical Systems) related research, here at the University of Michigan at Ann Arbor in the Mechanical Engineering and Applied Mechanics (MEAM) Department.


Madou , Marc

Dr. Marc Madou's Web Site

292 Watts Hall, 2041 College Rd.

Phone: (614) 292-9212

E-mail: madou.1@osu.edu

Fax: (614) 292-9377

Mailing address is:

477 Watts Hall, 2041 College Road

Columbus, Ohio 43210


Muller , Richard S.

Director, Berkeley Sensor & Actuator Center (BSAC)

Department of Electrical Engineering and Computer Sciences

University of California at Berkeley


Najafi, Khalil

Associate Professor

Center For Integrated Sensors and Circuits

Deptartment of Electrical Engineering and Computer Science

University of Michigan

1301 Beal Avenue

Ann Arbor, Michigan, 48109-2122

Tel: (734) 763-6650, Fax: (734) 763-9324


Nguyen , Clark T.-C.

2406 EECS Bldg., Department of Electrical Engineering & Computer Science

1301 Beal Ave, Ann Arbor, Michigan 48109-2122

Tel: (313) 764-1220, Fax: (313) 763-9324

E-mail: ctnguyen@eecs.umich.edu


Ozsoz , M. E. Sengun

Professor, Department of Analytical Chemistry, Faculty of Pharmacy.

Ege University

35100 Bornova - Izmir, Turkiye


(232) 388 2241 Tel

(232) 388 52 58 FAX


Pisano , Albert 'Al' P.

Program Manager

Electronics Technology Office (ETO)

Defense Advanced Research Projects Agency (DARPA)

The primary goal of the DARPA MEMS Program is to develop the technology to merge sensing, actuating, and computing in order to realize new systems that bring enhanced levels of perception, control, and performance to weapons systems and battlefield environments.


Solgaard , Olav

Assistant Professor

University of California, Davis

Microphotonics Laboratory


Tabata , Osamu

Osamu Tabata's Home Page

He is an associate editor of Journal of Micro Electro Mechanical Systems and an editorial board member of Sensors and Actuators. Also he is a program committee member of many International Conferences. He is a member of the Institute of Electrical Engineers of Japan, the Society of Mechanical Engineers and the Institute of Electrical and Electronics Engineers. He is currently engaged in the research and development of solid-state sensors, integrated silicon sensors, MEMS, silicon micromachining and thin film mechanical property evaluation.



Trimmer , William S. N.

President of Belle Mead Research, specializing in MEMS.

Editor of the IEEE book "Micromechanics and MEMS"


Williams , Kirt R.

He is studying micromachined vacuum devices based on thermionic emission (i.e., using a hot cathode) and the technology to fabricate them. These devices have application as sensors and in amplifying and logic circuits (i.e., as vacuum tubes), and are expected to be able to withstand higher temperatures and more intense radiation than conventional semiconductor devices. They can also be used as intense, very localized broadband radiation sources in spectroscopic sensors.


Winick , David

David Winick's home page

His ongoing projects include

Design and Application of Microelectromechanical Interconnect

Electronics Research Laboratory Homepage

Hyperscalar Microprocessor Design

Object Oriented File System



Space and Spacecraft Related Sites

Basics of Space Flight

This module is the first in a sequence of training modules that pertain to space flight operations activities. There is no prerequisite. The goal of this training module is to provide an aid for identifying and understanding the general concepts associated with space flight in general and deep space missions in particular. It offers a broad scope of limited depth, presented in 17 chapters. Specific learning objectives are listed at the beginning of each chapter in terms of what you are expected to be able to do upon finishing the chapter.


European Space Agency (ESA)

The European Space Agency is at the core of Europe's civil space programme.

Six European countries (Belgium, France, Germany, Italy, the Netherlands and the United Kingdom) associated with Australia, joined together in 1962 in ELDO, the European Launcher Development Organisation, to develop and build a launcher system. In 1962, the same countries plus Denmark, Spain, Sweden and Switzerland formed ESRO, the European Space Research Organisation, to undertake satellite programmes. Since then the founding members have been joined by Austria, Norway and later by Finland. Cooperation agreements have been signed to allow Canada to participate in certain ESA programmes and sit on the ESA Council.

ESA's activities fall into two categories : mandatory and optional programmes. Programmes carried out under the general budget and the science programme budget are mandatory; they include the Agency's basic activities (studies on future projects, technology research, shared technical investment, information systems and training programmes). All the Member States contribute to these programmes on a scale based on their national income. The other programmes, known as "optional", are of interest to only some of the Member States, who are free to decide on their level of involvement. Optional programmes are in areas such as Earth observation, telecommunications, space transportation (Ariane) and manned spaceflight.



ESA Technology Pages

The European Space Technologies Catalogue (EST) offers an overview of products in both public and commercial programmes. It is a quick reference guide of what is available in Europe. For manufacturers, system integrators and space agencies.

Preparing For the Future is a quarterly newsletter from ESTEC, ESA's Technology Centre. It highlights recent technological achievements performed through ESA contracts. For engineers and space-interested public.

Transferable European Space Technologies (TEST). Space Technologies available for many non-space businesses: medicine, sports, transportation and many more.



AeroAstro develops highly efficient space systems which significantly lower the cost of space operations, bring space capability to a much wider constituency, and realize new space missions which become feasible by virtue of their low cost.


Orbital Sciences Corporation

Since Orbital's founding in 1982, we have focused on one overriding objective -- making space more affordable, accessible and useful to millions of people on Earth. We have progressed toward that goal, first with the development of revolutionary small space systems - launch vehicles, satellites, space sensors and electronics, and ground stations - and then by expanding into satellite access products, and, finally, into satellite-based communications and information services. This unrivaled blend of capabilities incorporates innovative product designs, advanced technologies and lean manufacturing operations that reduce the cost of using space.


Orbiting Technology Testbed Initiative (OTTI) Integrated Trade Study

The general objective of this integrated NASA trade study is to determine the need and feasibility of developing an in-flight testbed in support of future NASA, DoD, and commercial satellite programs. The concept is expected to determine whether such a mission (or series of missions), when launched into a harsh radiation environment above low earth orbit (LEO) will provide a means of enabling the advent of improved performance and reduced cost spacecraft.


The Aerospace Corporation

The Aerospace Corporation draws on a breadth and depth of technical expertise to provide general systems engineering and integration for all phases of space systems development. These phases included initial concept test design and design validation, early-orbit check-out and operation and all the intermediary phases. Because of its involvement with the full range of national security space programs, as well as many NASA and other civil and commercial space systems, The Aerospace Corporation is in a position to consolidate a large body of lessons learned and to contribute essential integration of engineering tasks among all programs.


SOAP; Satellite Orbital Analysis Program

SOAP is an Aerospace Corporation developed interactive 3D orbit visualization and analysis program for Windows 95/NT, Power Macintosh, and Sun Solaris computers. SOAP is capable of simultaneously propagating thousands of satellites, ground stations, aircraft, ships, and planets. In addition to real-time visualization, SOAP has extensive orbit analysis and output capabilities.

SOAP - Major Features

"Real-time" general-purpose satellite visualization.

Supports NORAD SGP4, ASTROLIB, Low Thrust, and SPICELIB (JPL) propagators.

"Live" animated XY plotting of over 80 types of information (orbit parameters, true/false visibility

between objects, angles between objects, rise-set times, and much more).

Extensive capability for sensor modeling, pointing, and swath generation.


SUNSAT, Stellenbosch University Satellite

Sunsat is a micro-satellite built by post-graduate engineering students in the Electronic Systems Laboratory, in the Department of Electrical and Electronic Engineering at the University of Stellenbosch.It is due for launch in 1998 on a Delta II Launch Vehicle. Payloads include NASA experiments, Radio Amateur communications, a high resolution imager, precision attitude control, and school experiments. At present the launch time is expected to be 8 January 1999 at 10h58,30 GMT.


Joe's Rocket Simulations

This site contains'

Delta-V Calculator

Simple Rocket Simulator

Simulation Code in Java

Links to other rocket simulators


MLB Company

MLB produces and sells unmanned airplanes and helicopters that are also called micro air vehicles (MAVs), unmanned air vehicles (UAVs), spy planes, and remotely piloted vehicles (RPVs). We build aircraft for research and development, R&D, in aeronautics, communications and robotics. Our services include airborne photographs and videos also known as helicopter video, aerial photography and airborne video. Our engineering involves autonomous helicopters, autonomous aircraft, radio controlled aircraft and helicopters, and aerial robotics. Our aeronautical designs, R&D and aerodynamics use multidisciplinary design optimization (MDO). Steve Morris (Stephen J. Morris) is President of MLB, also known as MLB Co and MLB Company.



National Space Development of Japan

This homepage is a compilation of overall information about the organization of the National Space Agency of Japan(NASDA), its activities, technology, and publications. Menu items listed in the homepage include NASDA's structure, launch information, press releases and technical information, covering a wide variety of NASDA's current activities..


It also contains links to many more space related sites worldwide at



The French space agency activities in earth and environmental sciences


ARGOS Space Technology

ARGOS is the largest and most capable Air Force research and development (R&D) satellite ever to fly. This heavy-weight satellite, of almost three tons, responds to the periodic need to fly Department of Defense (DoD) payloads which cannot be flown on the space shuttle or small launch vehicles due to complexity, size and mission duration constraints.


Spectrum Astro

Founded in 1988 for the design and manufacture of low-cost, high performance satellites, Spectrum Astro is today the industry leader in developing space technologies for scientific, defense and commercial applications.


SpaceQuest, Ltd.

SpaceQuest is a small business specializing in the design, development, test and operation of low-earth orbit satellites, wireless communications equipment, and data relay systems. SpaceQuest constructed the first mobile satellite communications terminal to be carried to the North Pole by an Arctic expedition team. The terminal was used to transmit two-way messages and digital photographs to SpaceQuest's satellite ground station in Fairfax, Virginia.



The nonprofit American Institute of Aeronautics and Astronautics is the principal society and voice serving the aerospace profession. Its primary purpose is to advance the arts, sciences, and technology of aeronautics and astronautics and to foster and promote the professionalism of those engaged in these pursuits.


Air Force Research Laboratories


Grapefruits To Orbit


Canadian Space News

Canadian Space News, published since October 1995, is a monthly, e-mail based, news feed covering news of general interest on Canadian space-related activities.


Canadian Space News

Under construction


Small Satellite and Related Pages

These pages form an index to useful web information that discusses satellite constellations. You won't get a complete picture of what any scheme is capable of, or in-depth technical details, but you will get an idea of who the competitors in this new area are, and where the market is going.


Small Satellites Home Page

The purpose of these page is to provide up to date information, resources, references and links for space researchers and enthusiasts via the medium of the internet, and in particular the World Wide Web.


Microcosm, Inc.

Microcosm, established in 1984, specializes in reducing space mission cost. Their experience covers commercial, military, and scientific missions from small, low-cost programs to multi-billion dollar, multi-satellite constellations and a family of launch vehicles.


Center for Satellite Engineering Research, University of Surrey, Guildford, Surrey GU2 5XH, United Kingdom

The following site contains a list of educational establishments known to be involved in small spacecraft projects. This can be either in experiments, parts of satellites, or entire satellites. Where known, specific spacecraft project names appear in brackets, including a year when launched (or expected to be launched).


Weber State U. Center for Aerospace Technology

Ref: http://www.gsfc.nasa.gov/gsfc/small_sat/small_sat.html

Johns Hopkins U. Applied Physics Lab. Space Department

The Space Department, as part of the Applied Physics Laboratory, advances the University's public service mission through research, education, and the application of knowledge to human affairs. The Department, as a university resource for space systems, defines and implements solutions to problems in both the civilian and national security arenas through the development and application of space science, engineering, and technology.


MIT Space Engineering Research Center

Ref: http://www.gsfc.nasa.gov/gsfc/small_sat/small_sat.html

University of Maryland Space Systems Laboratory

The Space Systems Laboratory (SSL) is dedicated to making human beings more productive while working in space. They believe that both humans and robots, working together, are necessary to accomplish this goal. They are currently developing robotic systems capable of assisting astronauts in EVA (spacewalk) tasks, thus making EVA excursions shorter and safer, and in some cases allowing astronauts to perform tasks that would otherwise be impossible. They also study the ways the human body works in space, quantify human abilities in orbit, and design tools and systems to help astronauts work in space.


Satellite Tracking WEB Page



Stanford University's Space Systems Development Laboratory



Other sites of interest to space system designers around the web, including publications, conferences, databases and other university programs around the world.


Orbiting Picosatellite Automated Launcher, OPAL

OPAL is Stanford University's second Satellite QUIck Research Testbed (SQUIRT) satellite. As part of the Space Systems Development Laboratory (SSDL) the SQUIRT project exposes graduate level students to all aspects of satellite design, construction, testing, and operations.


Center for NanoSpace Technologies

A Division of the Institute for Advanced Interdisciplinary Research


Hephaestus Systems, Inc. manufactures and operates state-of-the-art micro and nano-satellites for academic and corporate projects. Based on the SQUIRT-Class microsatellite specification developed by Stanford's SSDL (Satellite Systems Development Laboratory), the satellites designed, built, and operated by HSI continue to push the upper bounds of technological innovation, reliability, and mission success.


Satellite Links

Nano, micro and small university satellites, satellites link pages, satellites and deep, space missions and companies, general Space






SpaceVest has become a world leader since its founding in 1991 for venture capital investments in privately-held Space Industry companies - companies which supply, support, or depend on space-related activities encompassing a broad array of applications. These applications include wireless telecommunications, positioning systems, satellite remote sensing, geographical information systems, advanced security systems, software tools, and many other growth areas. Investments are diversified across the four distinct sectors of the Space Industry: Telecommunications, Infrastructure, Emerging Applications, and Support Services.


Scientific and Technical Information

Note: While these are publicly available Web sites, they are designed for users with advanced technical knowledge of NASA's programs and related fields.


NASA Advanced Human Support Technology Program

The Advanced Human Support Technology Program supports NASA and Life Sciences Division goals and objectives by supporting the development of technology enabling space missions. The program has three elements:

Space Human Factors Engineering

Advanced Life Support and

Advanced Environmental Monitoring & Control


Munin Nanosatellite

Very small - Mass: approximately 5 kg.

Very fast - 1.5 years from idea to orbit.

Low Cost - fraction of traditional scientific satellite cost.

Scientific value - Payload: science instruments for auroral


Student project - Swedish Institute of Space Physics / Luleå

University of Technology joint project.


"The Space Environment: An Overview " by C. K. Purvis, NASA Lewis Research Center.

The interactions between space systems and their orbital environments are discussed in overview. Attention is focused on those environment factors appropriate to earth orbital vehicles. Ways in which space systems interact with their environment and effects on system performance and lifetime are described.

The information in this document represents "basic" knowledge concerning space environment effects and their interactions with spacecraft. It is meant as introductory material to the field and attempts to capture the present state of knowledge. As such it is an evolving document.


EWB: The Environment WorkBench

EWB is a desktop (available for UNIX and PC/MS-Windows), integrated analysis tool for the study of a spacecraft interactions with its environment. Over 100 environment and analysis models are integrated into the menu based tool.


NASA Goddard Space Flight Center , Small Satellite Technology Pages


National Aeronautics and Space Administration

Spacecraft Systems Division

Customer Needs Page Electric Currents from Space


Electric Currents from Space


The Radio Amateur Satellite Corporation


Keplerian Elements Tutorial. This tutorial is based on the documentation provided with InstantTrack, written by Franklin Antonio, N6NKF.


NASA, Small Spacecraft Technology Initiative


Little Robots in Space

American Scientist, March-April, Science Observer



Teledesic is building a global, broadband "Internet-in-the-Sky." Using a constellation of low-Earth-orbit satellites, Teledesic and its partners will create a network to provide affordable, worldwide, "fiber-like" access to telecommunications services such as broadband Internet access, video conferencing, high-quality voice and other digital data needs. On Day One of service (2003), Teledesic will enable broadband telecommunications access for businesses, schools and individuals everywhere on the planet.


Beam Robotics



Other Sites of Interest

Elsevier Science



Online catalog


Browse through all abstracts of all issues of the journal since 1996.


Free sample copies


A Guide to math resources

Offers resource jump list to various math resources, including the Latex, Tex, and Maple packages. Also contains jumps to math related gopher sites, newsgroups, math institues, and a math software index.


A listing of Physics Resources on the World Wide Web


White House Office of Science & Technology Policy

The Office of Science and Technology Policy (OSTP) was created in 1976 to provide the President of the United States with timely policy advice and to coordinate the science and technology investment.


Canadian Technology Gateway


Gopher periodic table of the elements


Accelerator Physics at SLAC

Describes accelerator physics at the Stanford Linear Accelerator Center. Includes links to most accelerator physics and resources on the web, including almost all accelerator labs in the world, lab-specific and general news and job-listing sites, physics societies and organizations, texts, and more.


Kluwer Academic Publishers Home page.

This is an electronic gateway to Kluwer, and it 's free, it's current, and it's all available on your computer. Each Kluwer journal has its own home page, which includes past, present, and future article listings. Here you can also review the aims and scope for any journal, along with submission and subscription information.


Hacker Proof 98 was designed and developed to protect you on the Internet from being hacked by other individuals and to protect your computer data. It was designed to give you an absolute sense of security and privacy when you're on-line.


CFX, Computational Fluid Engineering

CFX is a fluid engineering software tool which you can use to simulate many types of industrial flow and heat transfer processes.



Fedworld is maintained by NIST and provides a channel of access to several hundred U.S. Government computer systems.



A free service from Institute of Physics Publishing. It provides a moderated global e-mail directory

of people working in science; a place where you can search for peers, colleagues or any useful contacts in

your chosen scientific field.


National Science Foundation

The National Science Foundation is an independent U.S. government agency responsible for promoting science and engineering through programs that invest over $3.3 billion per year in almost 20,000 research and education projects in science and engineering.


Display Technology Systems (DTS)

DTS is a design and manufacturing company providing ultrahigh vacuum (UHV) process tools to people in the flat panel display industry. Having produced some of the world's finest UHV equipment at Perkin-Elmer, Varian, EPI and Superior Vacuum Technology, the DTS team provides proven expertise in making tools to people developing Field Emission Device (FED) flat panel displays.


Silicon Light Machines (Formarly Eschelle, Inc.)

Silicon Light Machines was formed to revolutionize high resolution displays through the application of Grating Light Valveª, or GLVª technology. We will commercialize a broad range of display modules and products based on the patented GLV technology.



A science and engineering metadirectory maintained by professional scientists whose mission is to identify and centralize access to the most valuable scientific resources online. SciCentral currently constitutes a gateway to over 50,000 sites pertaining to over 120 specialties in science and engineering.


Ecole Polytechnique Federale de Lausanne, Swiss Federal Institute of Technology

Miniature Robots and Subsystems Group


Robot learning, biovision and robotics


Collective Robotics Group


Links to other robotics sites



Transtech Parallel Systems designs and manufactures embedded multi-processing products for OEM, end-user and scientific research applications. Transtech produces signal processing and computing systems based on Analog Devices SHARC (Super Harvard ARChitecture) DSPs, PowerPC processors, Texas Instruments TMS320C4x DSPs, SGS Thomson transputers and the Intel i860.



Microelectronics and Computer Technology Corporation

MCC is an industrial research and development consortium that provides consortial R&D services. MCC maps precompetitive technology in advanced electronics and information technology to the business requirements of its member companies. MCC's research and development strategy encompasses three key activities: technology development, technology sourcing, and technology integration.


Search the site below for satbot.


Spatial Self-Organization in Large Populations of Mobile Robots by Cem Ýnsal and John S. Bay


"Self-Organization in Large Populations of Mobile Robots", by Cem Ýnsal

Thesis submitted to the Faculty of the Virginia Polytechnic Institute and State University in partial fulfillment of the requirements for the degree of Master of Science



MicroMath develops and distributes software for scientists and engineers. Our Windows/DOS based products establish a new category of software exclusively for solving equation systems and fitting experimental data .


MathSoft, Inc.

MathSoft is a provider of math, science and engineering software for business, research, academic and government markets.


or, to go directly to the Mathcad page,


North Carolina State University Scanning Probe Homepage


U.S. Federal Government Agencies Directory

A List of Federal Agencies on the Internet


National Center for Environmental Research and Quality Assurance

Office of Research and Development

U. S. Environmental Protection Agency


Institute of Robotics and System Dynamics

Design of mechatronic systems is the main goal of the institute. Examples are new lightweight robots and advanced vehicle systems with active components. Such projects integrate the core skills in dynamic system modelling and simulation, design of robust control algorithms and multibody formalisms, development of highly integrated robot sensors and actuators and remote control of semi-autonomous systems.


National Engineering Education Delivery System

Here is a site listing engineering tutorials.




This page is maintained to promote communication within the MEMS community and to provide information to any interested parties. The criteria for a site being listed are that it contains information deemed by the author as useful to the MEMS community and that he is aware of its existence. No recommendation or endorsement of any organization, product or person maintaining the sites is either stated or implied.


Other web sites are welcomed to set links to this site. However, it may not in any way be copied in part or in its entirety without the express written permission of the author.

Return to MEMS at trimmer.net (TM)