UHV and Reactive Sputtering Publications

• "Process Monitoring and Control of Low temperature Reactively Sputtered AlN", S. R. Kirkpatrick, S. L. Rohde, D. M. Mihut, M. L. Kurrupu, J. R. Swanson III, D. Thomson, J. A. Woollam, Thin Solid Films (1998).
• "Design, Plasma Studies, and Ion Assisted Thin Film Growth in an Unbalanced Dual-Target Magnetron Sputtering System with a Solenoid Coil.", C. Engstrom, T. Berlind, J. Birch, L. Hultman, I. P. Ivanov, S.R. Kirkpatrick, and S. Rohde, Vacuum (in print).
• "Combined Control Techniques for Reactive Sputtering of Wear/Abrasion Resistant TiN, Cr₂N, CrN and AlN Films on Compliant and/or Temperature Sensitive substrates." M. L. Kurruppu, G. Negrea, S. Kirkpatrick, D. Mihut, S. L. Rohde. SVC Technical Conference Proceedings(in print)